A non-contact fiber-optical piezomechanical (FOP) nano-micropositioning, manipulating and measuring system has been developed and investigated. The system consists of a non-contact fiber one optopair reflection sensor with a semiconductor light source (light diode), a reflected light receiver with a p-i-n photo diode, an amplifier of electronic signals, and a positioning device, the resolution of which is 0.5 µm. The diameter of the fiber sensor measuring head is 3 mm and its length is 10 mm. The positioning device is fixed in front of a mirror. The diameter of fiber core is 100 µm and the external diameter is 125 µm (WF100/110/125P22). Fiber length may reach up to 200 m. The FOP system also has a piezoceramics positioning and manipulating system with a mirror. The piezoceramics system is fastened to the positioning device. The dependence of the fiber sensor signal U on the distance h to the mirror, located on piezoceramics, has been measured. The obtained U-h characteristic has a peak on two parts of linear dependence of an increasing and decreasing signal. Sensitivity of the U-h linear part in front of the peak is higher and equal to 1.6725 nW/nm, and that of the decreasing signal part is 1.388 nW/nm. These parts can be used for displacement indication and measuremen

J. Verkelis

V. Kleiza

English

Kleiza, V.

Verkelis, J.

Journal of Mechatronics and Artificial Intelligence in Engineering

The fiber-optic non-contact piezomechanical nano-micro positioning, manipulating and measurement system

Journal of Mechanical Engineering, Automation and Control Systems

  VIBROMECHANIKA.  JOURNAL OF  VIBROENGINEERING.  JUNE   2008,   VOLUME  10,  ISSUE  2,  ISSN 1392-8716  180 356. The fiber-optic non-contact piezomechanical nano-micro          positioning, manipulating and measurement sy tem   V. Kleiza1, a, J. Verkelis2, b 1Kaunas University of Technology, Klaip÷dos 1, LT-35209 Panev÷žys, Lithuania 2Semiconductor Physics Institute, Goštauto 11, LT-01108 Vilnius, Lithuania E-mail:  avytautas.kleiza@ktu.lt, bjverk@pfi.lt  (Received 30 April 2008; accepted 13 June 2008)     Abstract. A non-contact fiber-optical piezomechanical (FOP) nano-micropositioning, manipulating and measuring system has been developed and investigated. The system consists of a non-contact fiber one optopair reflection sensor with a semiconductor light source (light diode), a reflected light receiver with a p-i-n photo diode, an amplifier of electronic signals, and a positioning device, the resolution of which is 0.5 µm. The diameter of the fiber sensor measuring head is 3 mm and its length is 10 mm. The positioning devic is fixed in front of a mirror. The diameter of fiber core is 100µm  and the external diameter is 125µm  (WF100/110/125P22). Fiber length may reach up to 200 m. The FOP system also has a piezoceramics positioning and manipulating system with a mirror. The piezoceramics system is fastened to the positioning device. The dependence of the fiber sensor signal U on the distance h to the mirror, located on piezoceramics, has been measured. The obtained U-h characteristic has a peak on two parts of linear dependence of an increasing and decreasing signal. Sensitivity of the U-h linear part in front of the peak is higher and equal to 1.6725 nW/nm, and that of the decreasing signal part is 1.388 nW/nm. These parts c n be used for displacement indication and measur ment.  Keywords: Fiber-optic sensor, nanometric displacement measurement, piezoelectric actuator, experiment.   1. Introduction  Piezoceramic-piezoelecric actuators are wide used in precise positioning systems that demand a high resolution such as scanning microscopy, vibration suppression, cell manipulation, etc. [1]. Optical and fiber-optic senors are used for noncontact precise nanometric displacement measurements [1, 2]. Interferometric [1] displacement measurements are cumbersome and expensive. Therefore fiber-optical sensors are superior for this purpose [3]. In this paper, there is a particular interest in the development of high sensitivity, nanometric resolution fiber sen ors, and application of piezoelectric actuators to this advancement, and vice versa.  2. Fiber-optic sensor  Several configurations of the fiber-optic noncontact reflection sensors are created for displacement measurement [4]. The fiber-optical sensor typically has two fibers, the active tips of which at the mirror a e parallel or create the angle θ (Fig. 1b). The experiment results (Fig. 1a)  show that sensitivity of the sensor having fiber tips parallel (θ =0º) is 3.011 a.u./µm at the rising part of the U-h characteristic and 0.734 a.u./µm at the decreasing part of the curve. If the active tips of the fibers create the angle θ=27.5º, the sensitivity is 98.4 a.u./µm and 62.9 a.u./µm, respectively (Fig. 1a). These values of sensitivity are much higher in both regions, sensitivity increases as the angle θ increases. There is no reason to increase θ more, because that increases the diameter of the sensor head and decreases sensitivity of the sensor to bending losses [5]. Moreover, as shown in Fig. 1a, by increasing the angle θ, due to the fact that fiber-optic tips lean on the mirror, we lose part of points of the curve in the domain of small h, where sensitivity is highest.     0 100 200 300 400 5000100020003000400050006000700080009000Signal U, a.u.Displacement h, µmθ=37.5οθ=32.5ο θ=27.5οθ=0οmirror h θ Fiber tips b a Fig. 1. Dependences of the signal U a. u. on the distance h from the fiber tips that create angle 2θh’ h’  356. THE FIBER-OPTIC NON-CONTACT PIEZOMECHANICAL NANO-MICRO POSITIONING, MANIPULATING AND MEASUREMENT SYSTEM.  V. KLEIZA1, A, J. VERKELIS2, B    VIBROMECHANIKA.  JOURNAL OF  VIBROENGINEERING.  JUNE   2008,   VOLUME  10,  ISSUE  2,  ISSN 1392-8716  181                     Therefore optimal angle θ was defined to be 25º. We succeeded in creating the sensor with the U-hcharacteristic from h=0 µm. The U-h characteristic of the sensor is represented in Fig. 2. The output signal U of the fiber-optic sensor was measured as the dependence of reflected light intensity in µW on the distance of fiber tips h from the mirror. This parameter can be easily transferred to current or voltage [2]. Sensitivities of the senor are 1.67 µW in the increasing part of the curve and 1.39 µW in the decreasing one. Those values corresponded to slopes of U-h characteristic linear parts (see Fig. 2).  3. The fiber-optic non-contact piezomechanical manipulating and measurement system  The fiber-optic non-contact piezomechanical manipulating and measurement system is presented in Fig. 3 and Fig. 4. The system has a translator 7T173-10 on which the fiber-optic sensor head, mechanical translation meter (with resolution 0.5 µm), and piezoceramic actuator with a holder were fastened. One end of the piezoceramics was tightly fastened to the holder and electrically isolated from it. The second end of piezoceramics has a mirror surface to reflect the light emitted from the fiber head and is able to freely move according to voltage Vp applied to the piezoceramics. Applied voltage was generated by a pulse generator Г6-27 (serrated, triangular, rectangular pulse) or a stabilized voltage source.                                    0 20 40 60 80 100 120 140 160 180 200 2200102030405060708090100Displacement h, µmSignal U, µµ µµWdU/dh=1.6725 µW /µmdU/dh=1.1388 µW /µmFig. 2. Dependence of the new sensor signal U on the distance h to the mirror on piezoceramics. The arrows show the centers of a linear part of the signal Translator Emitter  Pulse source p - i - n Piezoceramics Fibers Head of sensor Mirror Holder of piezoceramics W meter Oscilloscope Amplifier Translation indicator Current source Fig. 3. The fiber-optic non-contact piezomechanical nano-micro positioning, manipulating and measurement system  356. THE FIBER-OPTIC NON-CONTACT PIEZOMECHANICAL NANO-MICRO POSITIONING, MANIPULATING AND MEASUREMENT SYSTEM.  V. KLEIZA1, A, J. VERKELIS2, B    VIBROMECHANIKA.  JOURNAL OF  VIBROENGINEERING.  JUNE   2008,   VOLUME  10,  ISSUE  2,  ISSN 1392-8716  182 A fiber-optic sensor consists of a head, with the diameter 4 mm and it is 10 mm long. The fiber WF100/125P22 tips were installed in the head precisely by special installation equipment [6] to obtain a maximum output signal.                                 The other ends of fibers were installed in SMA 905 connectors. The photodiode (p-i-n) H22R880IR with the compatible connector was applied to light signal conversion to electric current. Sensitivity of the diode is 0.45 A/W, λ=850 nm. A compatible emitter H22E4020IR was applied as a light source the power of which was -15 dBm when the stabilized current 80 mA was supplied. The sensor output power was also measured by a precise fiber radiation meter LP-5025-8 or converted to voltage by a current-voltage converter and displayed on the oscilloscope.  4. Measurement  At first the U-h characteristic of the fiber optic sensor was measured by the translator 7T173-10, measuring the distance h from the tips of the fibers to the mirror and simultaneously measuring the output signal of the sensor by a precise light power meter. The results are shown in Fig. 2. In a contact with the mirror no light is emitted or received by the fiber, giving a zero output signal. As the distance of fiber tips to the mirror increases, an increasing amount of light is proportionally captured by the receiving                                                        fiber. The result is a very sensitive and linear signal ( 1.673µW/µmdU dh= ). As the distance increases further, the amount of light received approaches the0 200 400 600 800 100013.013.514.014.515.015.516.0Displacement,  h  µµ µµmU, mV  Experimental data  Linear fitdUp/dh=2.52 nm/mVFig. 5. Dependence of piezoceramics mirror displacement on the applied voltage Fig. 4. Research stand of piezoceramics response kinetics. 1 - a fiber-optic nano displacement sensor (the diameter of the head is 5 mm, it is 10 mm long); 2 - piezoceramics drive; 3 - holder; 4 - translator; 5 - mechanic translation measuring device (±0,5 µm); 6 - measuring device of power of the sensor output signal; 7 - transformation block of the sensor feeding signal (12 V); 8 - oscilloscope for investigating piezoceramics motion kinetics 8 3 5 6 7 4 1 2 a b c d Fig. 6. Oscillograms of input (upper curves) and output (lower curves) signals. The input signal oscillation frequncy is 100 Hz  356. THE FIBER-OPTIC NON-CONTACT PIEZOMECHANICAL NANO-MICRO POSITIONING, MANIPULATING AND MEASUREMENT SYSTEM.  V. KLEIZA1, A, J. VERKELIS2, B    VIBROMECHANIKA.  JOURNAL OF  VIBROENGINEERING.  JUNE   2008,   VOLUME  10,  ISSUE  2,  ISSN 1392-8716  183 maximum. After the maximum has been reached, a continued increase of the gap will proportionally reduce to the amount of light received. In the decreasing linear part, the U-h characteristic sensitivity is lower (Fig. 2) ( 1.139µW/µmdU dh= ). By the U-h characteristic we can pick up the distance h of the mirror on piezoceramics to the fiber active tips by the translator to obtain the signal U value being at the middle point of the linear interval of the curve (U=45 µW, h=42 µm). Mirror displacement can be performed by applying voltage to piezoceramics. The displacement of the mirror under this voltage V can be measured by the fiber sensor by the U-h characteristic. The measurement results are represented in Fig. 5. This figure shows a linear dependence of the mirror in the whole all interval of small voltage changes. The sensitivity of the displacement dh/dUp of piezoceramics-mirror to voltage was determined ( 2520nm/Vdh dUp= ). Vice versa, we can investigate the sensitivity of the fiber-optic sensor in a wide interval of the distances h. If we have a piezoelectrical ceramic transducer providing the displacement 250 µm at our disposal, we are able to obtain the U-h characteristic of the fiber-optic sensor by computer. Applying different pulses to piezoelectrical ceramic transducer, we can investigate dynamic characteristics of a piezoelectric transducer in a fixed frequency interval (Fig. 6). Fig. 6 presents oscillograms of the output signal U that were obtained with the input signal 100 Hz of different shapes (a - serrated, b and c – rectangular, d - triangular). As we see from Fig. 6c, as the frequency is 100 Hz, there emerges a resonance. It has been established that in the case of rectangular pulse, the resonance also emergs ven under the frequency of 20, 43, 100, 150 and 950 Hz.  5. Conclusions  The fiber-optic non-contact piezomechanical nano-micro positioning, manipulating and measurement sysem has been developed. A new type of a fiber-optic sensor of maximum sensitivity was designed, prototyped, and investigated. The FOP system allows us to investigate the kinetics of piezoceramic nano-micro positioning and manipulating systems in a non-contact way in the wide interval of frequency (up to 1 MHz), voltage, and displacement. Sensitivity of the system to voltage is 2.52 nm/mV. The diameter of the scanned ray is 50 µm. The FOP system makes it possible to measure and automatically write down the U-h characteristics of the fiber-optic reflection sensor in the media of different light refraction indices.       Acknowledgements  This work is supported by Lithuanian State Science Foundation (Grant No. T-104/08). The authors are much obliged to the Lithuanian Semiconductor Physics Institute in which the experim nts have been carried out, as well as to the companies AndaOpteck for fiber-optic sensors supplied free of charge, and Skaidula which presented the measurement equipment and produced fiber pigtails.   References  [1]  Marcal L. A. P., Leao J. V. F., Nader G., Higuti R. T., Kitano C., Silva E. C. N. Analysis of linearity and frequency response of a novel piezoelectric flextension actuator using a homodyne interferometer and the J1 –J2 method. IEEE Trans. Instrum. Measurements, Vol. 56, pp. 954, 2007. [2]  Kleiza V., Verkelis J. Fiber-Optic Sensors for Nanometric Displacement and Vibration Measurement in Mechatronics. Journal of Vibroengineering, Vol. 9, pp. 19, 2007. [3]  Kleiza V., Verkelis J. Fundamentals and Main Features of Advanced Reflection non Contact Two-Fiber Optopairs Displacement Sensors. Proc. SPIE, Vol. 6596, pp. 5960 U1. 2006. [4]  Verkelis J., Jankevičius R., Šarmaitis R. Light transmission in reflection fibre system. Lithuania J. Phys, Vol.  42, pp. 99, 2002. [5]  Snyder A. W., Michell D. J. Bending losses of multimode optical fibres. Electronic Letters, Vol. 10, pp. 11, 1974. [6]  Kleiza V., Verkelis J. Investigation and Comparison of Modelling and Experimental Results for the Fiber Optopair Reflection non Contact Displacement Sensor. Proc. SPIE, Vol. 6596, pp. 5960, V1. 2006.                           

Journal of Vibroengineering

  VIBROMECHANIKA.  JOURNAL OF  VIBROENGINEERING.  JUNE   2008,   VOLUME  10,  ISSUE  2,  ISSN 1392-8716 
 
180 
356. The fiber-optic non-contact piezomechanical nano-micro  
        positioning, manipulating and measurement system 
 
 
V. Kleiza1, a, J. Verkelis2, b 
1Kaunas University of Technology, Klaip÷dos 1, LT-35209 Panev÷žys, Lithuania 
2Semiconductor Physics Institute, Goštauto 11, LT-01108 Vilnius, Lithuania 
E-mail: avytautas.kleiza@ktu.lt, bjverk@pfi.lt 
 
(Received 30 April 2008; accepted 13 June 2008) 
 
 
 
 
Abstract. A non-contact fiber-optical piezomechanical (FOP) nano-micropositioning, manipulating and measuring system 
has been developed and investigated. The system consists of a non-contact fiber one optopair reflection sensor with a 
semiconductor light source (light diode), a reflected light receiver with a p-i-n photo diode, an amplifier of electronic 
signals, and a positioning device, the resolution of which is 0.5 µm. The diameter of the fiber sensor measuring head is 
3 mm and its length is 10 mm. The positioning device is fixed in front of a mirror. The diameter of fiber core is 100 µm  
and the external diameter is 125 µm  (WF100/110/125P22). Fiber length may reach up to 200 m. The FOP system also has 
a piezoceramics positioning and manipulating system with a mirror. The piezoceramics system is fastened to the 
positioning device. The dependence of the fiber sensor signal U on the distance h to the mirror, located on piezoceramics, 
has been measured. The obtained U-h characteristic has a peak on two parts of linear dependence of an increasing and 
decreasing signal. Sensitivity of the U-h linear part in front of the peak is higher and equal to 1.6725 nW/nm, and that of 
the decreasing signal part is 1.388 nW/nm. These parts can be used for displacement indication and measurement. 
 
Keywords: Fiber-optic sensor, nanometric displacement measurement, piezoelectric actuator, experiment.  
 
1. Introduction 
 
Piezoceramic-piezoelecric actuators are wide used in 
precise positioning systems that demand a high resolution 
such as scanning microscopy, vibration suppression, cell 
manipulation, etc. [1]. Optical and fiber-optic sensors are 
used for noncontact precise nanometric displacement 
measurements [1, 2]. Interferometric [1] displacement 
measurements are cumbersome and expensive. Therefore 
fiber-optical sensors are superior for this purpose [3]. In 
this paper, there is a particular interest in the development 
of high sensitivity, nanometric resolution fiber sensors, and 
application of piezoelectric actuators to this advancement, 
and vice versa. 
 
2. Fiber-optic sensor 
 
Several configurations of the fiber-optic noncontact 
reflection sensors are created for displacement 
measurement [4]. The fiber-optical sensor typically has 
two fibers, the active tips of which at the mirror are 
parallel or create the angle θ (Fig. 1b). The experiment 
results (Fig. 1a)  show that sensitivity of the sensor having 
fiber tips parallel (θ =0º) is 3.011 a.u./µm at the rising part 
of the U-h characteristic and 0.734 a.u./µm at the 
decreasing part of the curve. If the active tips of the fibers 
create the angle θ=27.5º, the sensitivity is 98.4 a.u./µm and 
62.9 a.u./µm, respectively (Fig. 1a). These values of 
sensitivity are much higher in both regions, sensitivity 
increases as the angle θ increases. There is no reason to 
increase θ more, because that increases the diameter of the 
sensor head and decreases sensitivity of the sensor to 
bending losses [5]. Moreover, as shown in Fig. 1a, by 
increasing the angle θ, due to the fact that fiber-optic tips 
lean on the mirror, we lose part of points of the curve in 
the domain of small h, where sensitivity is highest.  
 
 
 
0 100 200 300 400 500
0
1000
2000
3000
4000
5000
6000
7000
8000
9000
Si
gn
al
 
U,
 
a.
u
.
Displacement h, µm
θ=37.5
ο
θ=32.5
ο 
θ=27.5
ο
θ=0
ο
mirror 
h 
θ 
Fiber tips 
b a 
Fig. 1. Dependences of the signal U a. u. on the distance h from 
the fiber tips that create angle 2θ 
h’ 
h’ 
 356. THE FIBER-OPTIC NON-CONTACT PIEZOMECHANICAL NANO-MICRO POSITIONING, MANIPULATING AND MEASUREMENT SYSTEM.  V. KLEIZA1, A, J. VERKELIS2, B 
 
 
 VIBROMECHANIKA.  JOURNAL OF  VIBROENGINEERING.  JUNE   2008,   VOLUME  10,  ISSUE  2,  ISSN 1392-8716 
 
181 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
Therefore optimal angle θ was defined to be 25º. 
We succeeded in creating the sensor with the U-h 
characteristic from h=0 µm. The U-h characteristic of the 
sensor is represented in Fig. 2. The output signal U of the 
fiber-optic sensor was measured as the dependence of 
reflected light intensity in µW on the distance of fiber tips 
h from the mirror. This parameter can be easily transferred 
to current or voltage [2]. Sensitivities of the sensor are 
1.67 µW in the increasing part of the curve and 1.39 µW in 
the decreasing one. Those values corresponded to slopes of 
U-h characteristic linear parts (see Fig. 2). 
 
3. The fiber-optic non-contact piezomechanical 
manipulating and measurement system 
 
The fiber-optic non-contact piezomechanical 
manipulating and measurement system is presented in 
Fig. 3 and Fig. 4. The system has a translator 7T173-10 on 
which the fiber-optic sensor head, mechanical translation 
meter (with resolution 0.5 µm), and piezoceramic actuator 
with a holder were fastened. One end of the piezoceramics 
was tightly fastened to the holder and electrically isolated 
from it. The second end of piezoceramics has a mirror 
surface to reflect the light emitted from the fiber head and 
is able to freely move according to voltage Vp applied to 
the piezoceramics. Applied voltage was generated by a 
pulse generator Г6-27 (serrated, triangular, rectangular 
pulse) or a stabilized voltage source. 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
0 20 40 60 80 100 120 140 160 180 200 220
0
10
20
30
40
50
60
70
80
90
100
Displacement h, µm
Si
gn
a
l U
, 
µµ µµ
W
dU/dh=1.6725 µW /µm
dU/dh=1.1388 µW /µm
Fig. 2. Dependence of the new sensor signal U on the distance h 
to the mirror on piezoceramics. The arrows show the centers of a 
linear part of the signal 
Translator 
Emitter 
Pulse source 
p - i - n 
Piezoceramics 
Fibers 
Head of sensor 
Mirror 
Holder of 
piezoceramics W meter 
Oscilloscope 
Amplifier 
Translation 
indicator 
Current source 
Fig. 3. The fiber-optic non-contact piezomechanical nano-micro positioning, manipulating and measurement system 
 356. THE FIBER-OPTIC NON-CONTACT PIEZOMECHANICAL NANO-MICRO POSITIONING, MANIPULATING AND MEASUREMENT SYSTEM.  V. KLEIZA1, A, J. VERKELIS2, B 
 
 
 VIBROMECHANIKA.  JOURNAL OF  VIBROENGINEERING.  JUNE   2008,   VOLUME  10,  ISSUE  2,  ISSN 1392-8716 
 
182 
A fiber-optic sensor consists of a head, with the 
diameter 4 mm and it is 10 mm long. The fiber 
WF100/125P22 tips were installed in the head precisely by 
special installation equipment [6] to obtain a maximum 
output signal.  
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
The other ends of fibers were installed in SMA 905 
connectors. The photodiode (p-i-n) H22R880IR with the 
compatible connector was applied to light signal 
conversion to electric current. Sensitivity of the diode is 
0.45 A/W, λ=850 nm. A compatible emitter H22E4020IR 
was applied as a light source the power of which was -15 
dBm when the stabilized current 80 mA was supplied. The 
sensor output power was also measured by a precise fiber 
radiation meter LP-5025-8 or converted to voltage by a 
current-voltage converter and displayed on the 
oscilloscope. 
 
4. Measurement 
 
At first the U-h characteristic of the fiber optic sensor 
was measured by the translator 7T173-10, measuring the 
distance h from the tips of the fibers to the mirror and 
simultaneously measuring the output signal of the sensor 
by a precise light power meter. The results are shown in 
Fig. 2. In a contact with the mirror no light is emitted or 
received by the fiber, giving a zero output signal. As the 
distance of fiber tips to the mirror increases, an increasing 
amount of light is proportionally captured by the receiving  
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
fiber. The result is a very sensitive and linear signal 
( 1.673 µW/µmdU dh = ). As the distance increases 
further, the amount of light received approaches the 
0 200 400 600 800 1000
13.0
13.5
14.0
14.5
15.0
15.5
16.0
Di
sp
la
ce
m
en
t, 
 
h 
 
µµ µµ
m
U, mV
  Experimental data
  Linear fit
dUp/dh=2.52 nm/mV
Fig. 5. Dependence of piezoceramics mirror displacement on the 
applied voltage 
Fig. 4. Research stand of piezoceramics response kinetics. 1 - a 
fiber-optic nano displacement sensor (the diameter of the head is 
5 mm, it is 10 mm long); 2 - piezoceramics drive; 3 - holder; 4 - 
translator; 5 - mechanic translation measuring device (±0,5 µm); 6 
- measuring device of power of the sensor output signal; 7 - 
transformation block of the sensor feeding signal (12 V); 8 - 
oscilloscope for investigating piezoceramics motion kinetics 
8 
3 5 
6 
7 
4 1 
2 
a 
b 
c 
d 
Fig. 6. Oscillograms of input (upper curves) and output (lower 
curves) signals. The input signal oscillation frequency is 100 Hz 
 356. THE FIBER-OPTIC NON-CONTACT PIEZOMECHANICAL NANO-MICRO POSITIONING, MANIPULATING AND MEASUREMENT SYSTEM.  V. KLEIZA1, A, J. VERKELIS2, B 
 
 
 VIBROMECHANIKA.  JOURNAL OF  VIBROENGINEERING.  JUNE   2008,   VOLUME  10,  ISSUE  2,  ISSN 1392-8716 
 
183 
maximum. After the maximum has been reached, a 
continued increase of the gap will proportionally reduce to 
the amount of light received. In the decreasing linear part, 
the U-h characteristic sensitivity is lower (Fig. 2) 
( 1.139 µW/µmdU dh = ). 
By the U-h characteristic we can pick up the distance 
h of the mirror on piezoceramics to the fiber active tips by 
the translator to obtain the signal U value being at the 
middle point of the linear interval of the curve (U=45 µW, 
h=42 µm). Mirror displacement can be performed by 
applying voltage to piezoceramics. The displacement of 
the mirror under this voltage V can be measured by the 
fiber sensor by the U-h characteristic. The measurement 
results are represented in Fig. 5. This figure shows a linear 
dependence of the mirror in the whole all interval of small 
voltage changes. The sensitivity of the displacement 
dh/dUp of piezoceramics-mirror to voltage was determined 
( 2520nm/Vdh dUp = ). Vice versa, we can investigate the 
sensitivity of the fiber-optic sensor in a wide interval of the 
distances h. If we have a piezoelectrical ceramic transducer 
providing the displacement 250 µm at our disposal, we are 
able to obtain the U-h characteristic of the fiber-optic 
sensor by computer. Applying different pulses to 
piezoelectrical ceramic transducer, we can investigate 
dynamic characteristics of a piezoelectric transducer in a 
fixed frequency interval (Fig. 6). 
Fig. 6 presents oscillograms of the output signal U that 
were obtained with the input signal 100 Hz of different 
shapes (a - serrated, b and c – rectangular, d - triangular). 
As we see from Fig. 6c, as the frequency is 100 Hz, there 
emerges a resonance. It has been established that in the 
case of rectangular pulse, the resonance also emerges even 
under the frequency of 20, 43, 100, 150 and 950 Hz. 
 
5. Conclusions 
 
The fiber-optic non-contact piezomechanical nano-
micro positioning, manipulating and measurement system 
has been developed. 
A new type of a fiber-optic sensor of maximum 
sensitivity was designed, prototyped, and investigated. 
The FOP system allows us to investigate the kinetics 
of piezoceramic nano-micro positioning and manipulating 
systems in a non-contact way in the wide interval of 
frequency (up to 1 MHz), voltage, and displacement. 
Sensitivity of the system to voltage is 2.52 nm/mV. The 
diameter of the scanned ray is 50 µm. 
The FOP system makes it possible to measure and 
automatically write down the U-h characteristics of the 
fiber-optic reflection sensor in the media of different light 
refraction indices. 
 
 
 
 
 
 
Acknowledgements 
 
This work is supported by Lithuanian State Science 
Foundation (Grant No. T-104/08). 
The authors are much obliged to the Lithuanian 
Semiconductor Physics Institute in which the experiments 
have been carried out, as well as to the companies 
AndaOpteck for fiber-optic sensors supplied free of 
charge, and Skaidula which presented the measurement 
equipment and produced fiber pigtails. 
 
 
References 
 
[1]  Marcal L. A. P., Leao J. V. F., Nader G., Higuti R. T., 
Kitano C., Silva E. C. N. Analysis of linearity and 
frequency response of a novel piezoelectric flextension 
actuator using a homodyne interferometer and the J1 –J2 
method. IEEE Trans. Instrum. Measurements, Vol. 56, pp. 
954, 2007. 
[2]  Kleiza V., Verkelis J. Fiber-Optic Sensors for Nanometric 
Displacement and Vibration Measurement in Mechatronics. 
Journal of Vibroengineering, Vol. 9, pp. 19, 2007. 
[3]  Kleiza V., Verkelis J. Fundamentals and Main Features of 
Advanced Reflection non Contact Two-Fiber Optopairs 
Displacement Sensors. Proc. SPIE, Vol. 6596, pp. 5960 U1. 
2006. 
[4]  Verkelis J., Jankevičius R., Šarmaitis R. Light 
transmission in reflection fibre system. Lithuania J. Phys, 
Vol.  42, pp. 99, 2002. 
[5]  Snyder A. W., Michell D. J. Bending losses of multimode 
optical fibres. Electronic Letters, Vol. 10, pp. 11, 1974. 
[6]  Kleiza V., Verkelis J. Investigation and Comparison of 
Modelling and Experimental Results for the Fiber Optopair 
Reflection non Contact Displacement Sensor. Proc. SPIE, 
Vol. 6596, pp. 5960, V1. 2006. 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 


A non-contact fiber-optical piezomechanical (FOP) nano-micropositioning, manipulating and measuring system has been developed and investigated. The system consists of a non-contact fiber one optopair reflection sensor with a semiconductor light source (light diode), a reflected light receiver with a p-i-n photo diode, an amplifier of electronic signals, and a positioning device, the resolution of which is 0.5 mu m. The diameter of the fiber sensor measuring head is 3 mm and its length is 10 mm. The positioning device is fixed in front of a mirror. The diameter of fiber core is 100 mu m and the external diameter is 125 mu m (WF100/110/125P22). Fiber length may reach up to 200 m. The FOP system also has a piezoceramics positioning and manipulating system with a mirror. The piezoceramics system is fastened to the positioning device. The dependence of the fiber sensor signal U on the distance h to the mirror, located on piezoceramics, has been measured. The obtained U-h characteristic has a peak on two parts of linear dependence of an increasing and decreasing signal. Sensitivity of the U-h linear part in front of the peak is higher and equal to 1.6725 nW/nm, and that of the decreasing signal part is 1.388 nW/nm. These parts can be used for displacement indication and measurement

Kleiza, Vytautas,

Verkelis, Jonas,

Vilnius University Institutional Repository

The fiber-optic non-contact piezomechanical nano-micro positioning, manipulating and measurement system /

JVE International

https://www.jvejournals.com/article/10187/pdf

The fiber-optic non-contact piezomechanical nano-micro positioning, manipulating and measurement system

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Journal of Mechatronics and Artificial Intelligence in Engineering

Journal of Mechanical Engineering, Automation and Control Systems

Journal of Vibroengineering

Vilnius University Institutional Repository

JVE International