This work reports a comparative analysis between
the analytical and the finite element modelling, for the calculation
of the capacitance of microelectrode-based capacitors in both
parallel and coplanar architecture. It shows that the inverse-cosine
and the Schwartz-Christoffel methods underestimate the
capacitance value of the coplanar plate capacitor. It also shows
that the parallel architecture closed form solution and the finite
element modelling results agree well in all cases. The work finally
compares the effects of design parameter change of the
microelectrodes on the capacitance obtained from each technique.
It shows that finite element modelling provides the best estimate of
the capacitance of a coplanar plate capacitor
