The influence of essential process parameters on the adjustability of specific process and particulate properties of aluminum‐doped zinc oxide (AZO) nanocrystals during synthesis via the benzylamine route at low reaction kinetics is demonstrated by enabling time‐resolved access of the selected measurement technique. It is shown that the validity of the pseudo‐first‐order process kinetics could be extended to the minimum operable reaction kinetics. On the other hand, the impacts of the process temperature and the initial precursor concentration on both the process kinetics and the particle morphology are discussed. The obtained data provide a versatile tool for precise process control by adjusting defined application‐specific particle properties of AZO during synthesis
