This work is about surface analysis by nuclear techniques, which are essentially non-destructive, and computer simulation. The energy analysis method for nuclear reaction analysis is used. Elastic scattering is a particular and important case. Energy spectra are computer simulated and compared to experimental data, giving target composition and concentration profile information. The simulations use, mainly, target parameterization and available nuclear data. The method is successfully applied to determination of a uniform concentration profile of 18O from the (p,α) reaction in a thick oxide target. Uniform concentration profiles of 12C are obtained from the (d,p) reaction for a thick target. Uniform concentration profiles of 16O are also obtained from (d,p) and (d,α) reactions along large depths. Elastic scattering is used for depth profiling of Al and O in a thick target.University of Beira Interiorinfo:eu-repo/semantics/publishedVersio
