Atomic Force Microscopy (AFM) probe-based machining allows surface structuring at the nano-scale via the mechanical modification of material. This results from the direct contact between the tip of an AFM probe and the surface of a sample. Given that AFM instruments are primarily developed for obtaining high-resolution topography information of inspected specimen, raster scanning typically defines the trajectory followed by the tip of an AFM probe. Although most AFM manufacturers provide software modules to perform user-defined tip displacement operations, such additional solutions can be limited with respect to 1) the range of tip motions that can be designed, 2) the level of automation when defining tip displacement strategies and 3) the portability for easily transferring trajectories data between different AFM instruments. In this context, this research presents a feasibility study, which aims to demonstrate the applicability of a simple and generic CAD/CAM approach when implementing AFM probe-based nano-machining for producing two-dimensional (2D) features with a commercial AFM instrument

ARNAL, Benoît

BROUSSEAU, Emmanuel

GIBARU, Olivier

NYIRI, Eric

THIERY, Stéphane

English

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Emmanuel BROUSSEAU, Benoît ARNAL, Stéphane THIERY, Eric NYIRI, Olivier GIBARU - A
simple and generic CAD/CAM approach for AFM probe-based machining - In: 11th International
Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance,
LAMDAMAP 2015, Royaume-Uni, 2015-03-17 - 11th International Conference and Exhibition on
Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2015 - 2015
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Laser Metrology and Machine Performance XI 
 
 
 
 
 
A simple and generic CAD/CAM approach for 
AFM probe-based machining 
 
E. Brousseau
1*
, B. Arnal
2
, S. Thiery
2
, E. Nyiri
2
, O. Gibaru
2
 
1
 Cardiff School of Engineering, Cardiff University, Cardiff, UK 
2
 LSIS, Arts et Metiers ParisTech, Lille, France 
 
 
*
 Corresponding author: BrousseauE@cf.ac.uk 
 
 
Abstract 
 
Atomic Force Microscopy (AFM) probe-based machining allows surface 
structuring at the nano-scale via the mechanical modification of material. This 
results from the direct contact between the tip of an AFM probe and the surface 
of a sample. 
     Given that AFM instruments are primarily developed for obtaining high-
resolution topography information of inspected specimen, raster scanning 
typically defines the trajectory followed by the tip of an AFM probe. Although 
most AFM manufacturers provide software modules to perform user-defined tip 
displacement operations, such additional solutions can be limited with respect to 
1) the range of tip motions that can be designed, 2) the level of automation when 
defining tip displacement strategies and 3) the portability for easily transferring 
trajectories data between different AFM instruments. In this context, this 
research presents a feasibility study, which aims to demonstrate the applicability 
of a simple and generic CAD/CAM approach when implementing AFM probe-
based nano-machining for producing two-dimensional (2D) features with a 
commercial AFM instrument. 
 
1 Introduction 
 
A few years after the invention of the Atomic Force Microscope (AFM) as a 
device for imaging the surface topography of specimens at the nano-scale [1], 
researchers also began to use AFM instruments as platforms for performing a 
variety of nano fabrication tasks [2-4]. One of this fabrication techniques, which 
  
Laser Metrology and Machine Performance XI 
 
started being investigated in the early nineties [5-7], focusses on implementing 
machining operations with the tip of an AFM probe. This process enables the 
structuring of surfaces at the nano-scale by relying on the mechanical 
modification of material caused by the direct contact between the AFM probe tip 
and the sample surface. The AFM probe-based mechanical machining process 
has a number of attractive characteristics such as being relatively simple, low-
cost to implement, able to produce complex three dimensional (3D) features and 
applicable to machine a wide range of engineering materials such as metals, 
semiconductors and polymers [8]. 
     When using a commercial AFM instrument, raster scan is the typical path 
generation strategy implemented to define the trajectory followed by the tip of 
the AFM probe. This is due to the fact that standard AFM devices are primarily 
developed for the purpose of imaging the surface topography of a specimen. 
Although software modules are also provided by most AFM manufacturers to 
perform user-defined tip displacement operations, such solutions are limited and 
only enables fairly basic operations when implementing the AFM probe-based 
machining process. In particular, it is difficult for users to design a wide range of 
tip cutting trajectories with a high level of automation and also to transfer easily 
such trajectories data between different AFM instruments. As a result, in order 
to conduct particular AFM probe-based nano fabrication operations for a given 
system, customised procedures and computer routines often have to be 
implemented to enable the realisation of a large variety of tip trajectories. In the 
last fifteen years, the development of such customised solutions has been 
presented in a number of studies, which include the work of Horkas et al. [9], 
Lekki et al. [10], Klehn and Kunze [11], Cruchon-Dupeyrat et al. [12] and Xu et 
al. [13]. 
    However, a common drawback of these reported approaches is that they do 
not propose a solution where the generation of the tip cutting trajectories can be 
achieved in a fully automated manner while, at the same time, enabling the 
design and path planning steps to be conducted without purposely-built software 
programmes. Thus, in order to broaden the application areas of future AFM tip-
based nano machining studies, it would be advantageous to develop automated, 
portable and flexible solutions that could enable 1) the path of AFM tips to be 
defined via widespread design software tools and 2) the implementation of such 
tip trajectories to be conducted on a broad range of AFM instruments. The most 
promising approach for enabling such an increased flexibility and automation of 
the design and AFM-based fabrication tasks is that reported by Johannes et al., 
although, in the case of these authors, it was implemented for AFM probe-based 
anodisation operations [14, 15]. In particular, Johannes and co-workers 
developed a nano-scale design environment that incorporated conventional CAD 
and CAM software solutions. The interesting aspect of this work is that the G-
code file format was utilised to communicate the tip trajectories to an AFM 
controller. G-code is a widely used computer numerical control (CNC) 
programming language and thus, it is implemented by commonly found CAM 
software.   
  
Laser Metrology and Machine Performance XI 
 
    Thus, for the purpose of automating AFM probe-based nano machining tasks, 
it appears natural to reuse such an approach. This is due to the maturity of 
existing CAD/CAM solutions which, for conventional cutting processes, enable 
the seamless integration of the 3D modelling and the tool path planning steps. 
Therefore, the purpose of the research presented in this paper is to follow the 
method put forward by Johannes and co-workers in the context of nano 
machining operations rather than anodisation lithography. In particular, the 
objective of this study is to demonstrate the applicability of a simple and generic 
CAD/CAM approach when implementing AFM probe-based nano-machining 
for producing two-dimensional (2D) features with a commercial AFM 
instrument. 
 
2 CAD/CAM approach utilised 
 
Fig. 1 illustrates the CAD/CAM approach followed in this study. Two different 
freely available software were used to implement the CAD and CAM stages of 
the process. These were “LibreCAD” and “DXF2GCODE”, respectively. A 
post-processor was developed to translate G-code data into instructions 
understandable by the AFM controller. This was achieved using C++ libraries 
provided by the AFM manufacturer. For this feasibility study, the post-processor 
was implemented to interpret four different type of G-code instructions only. 
These were “G0” for tip displacements without machining, “G1” for machining 
linear interpolations and “G2” and “G3” for machining circular interpolations 
clockwise and anti-clockwise, respectively.  
 
 
Figure 1: CAD/CAM approach adopted 
 
 
CAD software 
CAM software 
Post-processor 
G-code file 
DXF file 
AFM controller 
Proprietary instructions 
  
Laser Metrology and Machine Performance XI 
 
 
3 CAD/CAM demonstration  
 
The AFM instrument utilised in this feasibility study was the XE-100 model 
from Park Systems. The probe employed to perform the machining experiments 
was a DNISP model from Bruker. This probe had a nominal normal spring 
constant of 221 N/m with a nominal tip radius of 40 nm as specified by the 
manufacturer. The workpiece processed was a single crystal copper sample 12 
mm in diameter and 8 mm in thickness. Prior to the experiments, the copper 
sample was polished using a procedure tailored for soft materials. The surface 
roughness achieved after polishing was Ra 4 nm as measured with the AFM 
instrument employed. 
    In order to illustrate the validity of the adopted CAD/CAM approach for AFM 
machining, a pattern already reported by Johannes et al. in [14] was designed as 
shown in Figure 2. In addition, the particular G-code that was fed to the 
developed post-processor is given in Table 1. It should be noted that the 
controller of the AFM instrument used in this study could only generate the 
lateral displacements of the AFM stage along four axes, namely in the directions 
perpendicular, parallel and at ± 45° angle with respect to the orientation of the 
long axis of the cantilever. Thus, to execute G-code instructions between points 
as accurately as possible, curves or lines representing planned tip trajectories 
have to be discretised into smaller segments oriented along one of these four 
constrained directions. In this study, such a discretisation step was achieved with 
the Bresenham’s line algorithm, which is commonly used in computer graphic 
applications.  Finally, based on preliminary trial experiments, it was decided to 
process the designed pattern with a normal applied force set at 12 μN and with a 
Bresenham discretisation step of 100 nm. Figure 3 shows an AFM image of the 
obtained result.  
 
 
Figure 2: Designed pattern  Figure 3: Machined result 
 
  
Laser Metrology and Machine Performance XI 
 
 
Table 1. G-code utilised 
G-code instructions 
G0 X-4.800 Y-4.800 
G2 X4.800 Y4.800 I4.800 J4.800 
G2 X-4.800 Y-4.800 I-4.800 J-4.800 
G0 X4.800 Y-4.800 
G3 X-4.800 Y-4.800 I-4.800 J-7.200 
G3 X-4.800 Y4.800 I-7.200 J4.800 
G3 X4.800 Y4.800 I4.800 J7.200 
G3 X4.800 Y-4.800 I7.200 J-4.800 
G0 X-10.124 Y5.476 
G3 X-5.476 Y10.124 I2.924 J1.724 
G0 X5.476 Y10.124 
G3 X10.124 Y5.476 I1.724 J-2.924 
G0 X10.124 Y-5.476 
G3 X5.476 Y-10.124 I-2.924 J-1.724 
G0 X-5.476 Y-10.124 
G3 X-10.124 Y-5.476 I-1.724 J2.924 
G0 X0.186 Y6.786 
G2 X0.186 Y-6.786 I-19.386 J-6.786 
G2 X-6.786 Y0.186 I-4.986 J1.986 
G2 X6.786 Y0.186 I6.786 J-19.386 
G2 X-0.186 Y-6.786 I-1.986 J-4.986 
G2 X-0.186 Y6.786 I19.386 J6.786 
G2 X6.786 Y-0.186 I4.986 J-1.986 
G2 X-6.786 Y-0.186 I-6.786 J19.386 
G2 X0.186 Y6.786 I1.986 J4.986 
G0 X0.000 Y0.000 
 
4 Conclusions  
 
The aim of this study was to demonstrate the feasibility of applying a simple and 
generic CAD/CAM approach when implementing AFM probe-based nano-
machining for producing 2D features with a commercial AFM instrument. This 
was realised using freely available CAD/CAM solutions during the design and 
tip trajectory planning stages of the process. This study suggests that through the 
utilisation of CAD/CAM software tools and commonly used file formats for 
software communication, it is possible to provide a high level of automation and 
flexibility for designing 2D nano-scale patterns and subsequently planning the 
corresponding AFM machining tasks. 
    However, it is anticipated that, when deploying this approach with any AFM 
instrument, it is still necessary to develop initially a post-processor that can 
translate the G-code format into instructions that can be understood by the AFM 
controller. This is due to the fact that conventional AFM systems are not 
developed with the primary purpose of conducting nano machining operations 
  
Laser Metrology and Machine Performance XI 
 
and understandably, they do not have built-in capabilities to read G-code input. 
In this research, this necessary link was established via the development of a 
C++ based post-processor for the AFM equipment controller in order interpret 
the G-code representation of tip path trajectories generated using the CAM 
software employed. 
 
5 References 
 
[1] Binnig G, Quate C and Gerber C 1986 Atomic force microscope Physical 
Review Letters 56(9) 930-934 
[2] Tseng A, Notargiacomo A and Chen T 2005 Nanofabrication by scanning 
probe microscope lithography: a review J. Vac. Sci. Technol. B 23(3) 877-
894 
[3] Xie X, Chung H, Sow C and Wee A 2006 Nanoscale materials patterning 
and engineering by atomic force microscopy nanolithography Materials 
Science and Engineering R54 1-48 
[4] Tseng A 2011 Removing material using atomic force microscopy with 
single- and multiple-tip sources Small 7(24) 3409-3427 
[5] Jung T, Moser A, Hug H, Brodbeck D, Hofer R, Hidber H and Schwarz U 
1992 The atomic force microscope used as a powerful tool for machining 
surfaces Ultramicroscopy 42 1446-1451 
[6] Jin X and Unertl W 1992 Submicrometer modification of polymer surfaces 
with a surface force microscope Applied Physics Letters 61(6) 657-659 
[7] Kim Y and Lieber C 1992 Machining oxide thin films with an atomic force 
microscope: pattern and object formation on the nanometer scale Science 
257(5068) 375-377 
[8] Brousseau E, Krohs F, Caillaud E, Dimov S, Gibaru O and Fatikow S 2010 
Development of a novel process chain based on atomic force microscopy 
scratching for small and medium series production of polymer nano 
structured components ASME Trans. Int. J. Mfg. Sci. 132(3) 030901 
[9] Horcas I, Fernández R, Gómez-Rodríguez J, Colchero J, Gómez-Herrero J 
and Baro A 2007 WSXM: a software for scanning probe microscopy and a 
tool for nanotechnology Review of Scientific Instruments 78 013705 
[10] Lekki J, Kumar S, Parihar S, Grange S, Baur C, Foschia R and Kulik A 
2004 Data coding tools for color-coded vector lithography Review of 
Scientific Instruments 75(11) 4646-4650 
[11] Klehn B and Kunze U 1999 Nanolithography with an atomic force 
microscope by means of vector-scan controlled dynamic plowing  J. Appl. 
Phys. 85(7) 3897-3903 
[12] Cruchon-Dupeyrat S, Porthun S and Liu G 2001 Nanofabrication using 
computer-assisted design and automated vector-scanning probe lithography 
Applied Surface Science 175-176 636-642 
[13] Xu K, Yang S and Qian X 2013 Integrating computer-aided design and 
nano-indentation for complex lithograph ASME Transactions, Journal of 
Micro and Nano-Manufacturing 1 011002 
  
Laser Metrology and Machine Performance XI 
 
[14] Johannes M, Kuniholm J, Cole D and Clark R 2006 Automated 
CAD/CAM-based nanolithography using a custom atomic force 
microscope IEEE Trans. Automation Sci. and Eng. 3(3) 236-239 
[15] Johannes M, Cole D and Clark R 2007 Three-dimensional design and 
replication of silicon oxide nanostructures using an atomic force 
microscope Nanotechnology 18(34) 345304 


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