Homoepitaxial growth and in-situ doping of monocrystalline alpha-SiC thin films by MOCVD for power device applications

Authors
Publication date
Publisher
서울대학교 대학원

Abstract

Thesis (doctoral)--서울대학교 대학원 :재료공학부,2002.Docto

    Similar works

    Full text

    thumbnail-image

    Available Versions

    SNU Open Repository and Archive

    redirect
    oaioai:s-space.snu.ac.kr:10371/35...
    Last time updated on 17/04/2020