Phase Feedback Active Stabilisation Of A Multiplexed Fibre Interferometer

Abstract

Current optical technologies for surface measurement such as white light scanning interferometry (WLSI) can produce sub-nanometric resolution areal height information. However, the sensitivity of such devices to external vibration coupled with their bulky nature requires that any workpiece be removed from the manufacturing line in order for measurement to be taken place. Clearly, a production line mountable, vibration stabilised device would provide benefits in manufacturing throughput and help reduce scrap rates. The multiplexed fibre interferometer (MFI) aims to provide this capability for high precision surfaces with submicron form deviation