The ever-growing demand for higher beam energies has dramatically increased the risk of RF breakdown, limiting the maximum achievable accelerating gradient. Field emission is the most frequently encountered RF breakdown where it occurs at regions of locally enhanced electric field. Electrons accelerated across the cavity as they tunnel through the surface in the presence of microscopic defects. Upon Impact, most of the kinetic energy is converted into heat and stress. This can inflict irreversible damage to the surface, creating additional field emission sites. This work aims to investigate, through simulation, the physics involved during both emission and impact of electrons. A newly developed 3D field model of an 805 MHz cavity is generated by COMSOL Multiphysics. Electron tracking is performed using a Matlab based code, calculating the relevant parameters needed by employing fourth Order Runge Kutta integration. By studying such behaviours in 3D, it is possible to identify how the cavity surface can alter the local RF field and lead to breakdown and subsequent damages. The ultimate aim is to introduce new surface standards to ensure better cavity performance