Particle Generation of CapaciTorr Pumps

Abstract

Non Evaporable Getter pumps have been used since four decades in various scientific and industrial Ultra High and Extremely Ultra High Vacuum applications. For the majority of applications properties like high pumping speed vs. small size, powerless operation and hydrocarbon cleanliness are main aspects for the usage. In addition to this a growing number of applications nowadays also require particle free systems. In this paper we report on investigations on in-vacuum particle creation during the conditioning and activation process of CapaciTorr pumps