A new surface analysis instrument has been developed using an energy-compensated time-of-flight mass spectrometer. Samples are ionised for analysis either by microfocussed laser irradiation or by sputtering with a microfocussed (< 0.25 µm) mass-filtered beam of Ga+ ions from a liquid metal ion source. A framestore-based data system allows the simultaneous capture o f both SIMS mass spectra and mass-resolved ion images. Data are presented illustrating both SIMS and Laser Microprobe performance. Data are also presented showing enhanced ion yield from the sputtering of a gold tip, due to field ionisation of sputtered neutrals
