Inductively Coupled Plasma Test Reactor Development And Plasma Measurements

Abstract

In this work, the design of an inductively coupled plasma test reactor is presented. The reactor is constructed with the goals to allow development of high density plasma diagnostics (Langmuir probe and optical emission spectroscopy) and optimization of the main plasma parameters, with the main emphasis on the radial uniformity of the plasma. A Faraday shield was installed to reduce the capacitive coupling to the plasma, resulting in a considerable improvement of the plasma uniformity and Langmuir probe measurements accuracy.PV 2005-08226234Hopwood, J., (1992) Plasma Sources Sci. Technol., 1, p. 109Lieberman, M.A., Lichtenberg, A.J., (1994) Principles of Plasma Discharges and Materials Processing, p. 390. , Wiley Interscience, New YorkCollins, G.J., Shaw, D.M., (1999) RF Inductively Coupled Plasma from the Circuit Model Viewpoint, , http://www.engr.colostate.eduece/pages/courses/Collins/ee543/Chapter13/ Chapter13.pdfGodyak, V.A., (1999) Journal of Applied Physics, 85, p. 703Hutchinson, I.H., (1987) Principles of Plasma Diagnostics, p. 51. , Cambridge University Press, CambridgeStenzel, R.L., Plasma Physics Laboratory, p. 97. , http://www.physics.ucla.edu/plasma-exp/180E-7/LprobeAnalysis.htmlHopwood, J., (1993) J. Vac. Sci. Technol. A, 11, p. 152Korstshagen, U., (1996) J. Phys. D: Appl. Phys., 29, p. 1224Cunge, G., (1999) Plasma Sources Sci. Technol., 8, p. 576Korstshagen, U., Heil, B.G., (1999) IEEE Trans, on Plasma Sci., 27, p. 1297Seo, S.-H., (2000) Phys. Review E, 62, p. 715