Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation

Abstract

Lead zirconate titanate (PZT) based piezoelectric micromachined ultrasonic transducers (PMUTs) for particle manipulation applications were designed, fabricated, characterized and tested. The PMUTs had a diaphragm diameter of 60 lm, a resonant frequency of ∼ 8 MHz and an operational bandwidth of 62.5%. Acoustic pressure output in water was 9.5 kPa at 7.5 mm distance from a PMUT element excited with a unipolar waveform at 5 Vpp. The element consisted of 20 diaphragms connected electrically in parallel. Particle trapping of 4 lm silica beads was shown to be possible with 5 Vpp unipolar excitation. Trapping of multiple beads by a single element and deterministic control of particles via acoustophoresis without the assistance of microfluidic flow were demonstrated. It was found that the particles move towards diaphragm areas of highest pressure, in agreement with literature and simulations. Unique bead patterns were generated at different driving frequencies and were formed at frequencies up to 60 MHz, much higher than the operational bandwidth. Levitation planes were generated above 30 MHz driving frequency