Cost-Efficient Manufacturing of a High Deflection Electrothermal Drive for Switching Applications

Abstract

We present a cost-efficient method for manufacturing of electrothermal actuators. For concept validation, a bidirectional out-of-plane actuator is fabricated using two Polyether Ether Ketone (PEEK) layers which are milled and assembled using rivets. The actuator generates a high open loop deflection of 4.4 mm, 21.5 mN blocking force and has a footprint of 35 x 13 mm². The presented device can be mass produced using manufacturing methods available for flexible printed circuit boards. It can be used to drive micro fluid valves and electrical switches which require relatively high deflection and driving forces