CORE
🇺🇦
make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
一种基于反应溅射迟滞效应的TiAlSiN涂层制备方法
Authors
夏原
李光
高方圆
Publication date
22 February 2019
Publisher
Abstract
本发明公开了一种基于反应溅射迟滞效应的TiAlSiN涂层制备方法,包括工件预处理、气路清洗、氩离子轰击、沉积结合层Ti、沉积过渡层TiN、沉积功能层TiAlSiN、冷却和出炉等步骤。本发明通过对反应溅射迟滞效应的“过渡模式”进行有效控制,在保证薄膜沉积速率的同时获得化学配比合适、结构性能优异的薄膜,解决了现有技术中存在的结构难以控制、沉积速率低、缺乏工艺稳定性和可重复性等问题,实现高硬度(38GPa)、低摩擦系数(0.3)、良好的附着力(大于80N)及耐高温性能好(超过1000℃)的TiAlSiN涂层的快速稳定制备,以该涂层制备的高速干切削刀具和高温成型模具在表面耐磨润滑及抗高温方面表现出很大的优势,具有巨大的经济和社会效益
Similar works
Full text
Available Versions
Institute Of Mechanics,Chinese Academy of Sciences
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:dspace.imech.ac.cn:311007/...
Last time updated on 22/03/2020