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AFM based anodic oxidation and its application to oxidative cutting and welding of CNT actuator
Authors
焦念东
王越超
董再励
Publication date
1 January 2009
Publisher
Abstract
探针阳极氧化是构建纳米结构,制造纳米器件的重要技术之一,本文对该技术中基于原子力显微镜(AFM)的阳极氧化进行了新的研究.通过对氧化加工中微观电场在基底表面分布情况进行模拟,分析了氧化结构的特征与电场分布的关系,通过实验研究分析了不同加工因素对氧化加工的影响.在这些研究基础上利用AFM阳极氧化技术实现了对碳纳米管(CNT)的氧化切割及焊接,为CNT基纳米器件的装配及制备提供了新的技术途径。</p
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Shenyang Institute of Automation,Chinese Academy Of Sciences
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Last time updated on 09/01/2019