'Institute of Electrical and Electronics Engineers (IEEE)'
Abstract
The principle of the Atomic Force Microscope
involves scanning an object using a probing tip that is
mounted on the free end of a micro mechanical cantilever.
While the sample is scanned horizontally the cantilever
deflects. The deflection of the cantilever can be sensed
among several methods. For instance, optical beam
deflection where this method is often used because of it’s
simplicity. While the scanning process of the sample stage,
the detected deflection is compared with the set point
deflection. Then, the error signal which is the difference
between the detected and set point deflection is minimized
by moving the sample stage in the Z – direction. At a set
point value this closed –loop feedback operation can
maintain the cantilever deflection and hence the tip –
sample interaction force. The sample surface is
approximately traced by the resulting 3D movement of the
sample stage. Therefore, usually the topographic image can
be formed from the electrical signals which are used to drive
the sample stage scanner in the Z- direction. In this paper,
the AFM topographic image is constructed using values
obtained by summing the height image that is used for
driving the Z- scanner and the deflection image with a
weight function that is close to 3. The value of has been
determined experimentally using trail and error. This
method gives more faithful topographic image