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Modeling and Simulation of Low Temperature Activation Processes
Authors
James D Driscoll
Publication date
1 January 2010
Publisher
RIT Scholar Works
Abstract
A method for simulating dopant activation at low temperatures is proposed and tested, with a proof of concept showing the expected behavior implemented
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Last time updated on 06/01/2018
RIT Scholar Works
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:repository.rit.edu:ritamec...
Last time updated on 12/01/2024