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Design of Experiments and Diffusion Characterization
Authors
James M Mortellaro
Publication date
1 January 1987
Publisher
RIT Scholar Works
Abstract
An ANOVA and factorial designs for optimization were were compared using a hypothetical LPCVD process situation. The three factorial proved superior Boron diffusion was optimized using the three factorial design
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oai:scholarworks.rit.edu:ritam...
Last time updated on 06/01/2018
RIT Scholar Works
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:repository.rit.edu:ritamec...
Last time updated on 12/01/2024
