This thesis explores a relatively new Solid Silver Thin Film Source technology, for the implementation of a novel High Precision Laser Radar Tracking device. The process which consists of a Ag+-Na+ ion exchange, is designed in two steps. It utilizes an initial electric field-aided ion exchange step for a predeposition, and a subsequent second diffusion step to force the profile latitude necessary for optimization of the device. While the entire project of implementing this device, consists of analyzing, processing, polishing and testing, this thesis covers only the process aspect in detail. The success achieved by obtaining the required Power Coupling Ratio curve on a Simple Coupler, demonstrates a novel integrated optic multimode feed for a Monopulse LIDAR application
