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MODELLING AND CHARACTERIZATION OF ELEMENTARY MICROWAVE PLASMA SOURCES AT MEDIUM PRESSURE (1 TO 50 TORR) FOR HIGH RATE DEPOSITION
Authors
Bechu S.
Bes A.
Lacoste A.
Ortega A.M.
Publication date
1 March 2020
Publisher
Abstract
-132-13
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oai:rour.neicon.ru:rour/154685
Last time updated on 04/04/2020