Creation of fluorescent defects at desired position and structures will play an important role for development of quantum devices. Compared to other microfabrication techniques, focused particle beam is excellent tool for defect engineering on wide band-gap semiconductors. There are several studies on micro-processing using various focused particle beam writing (PBW) techniques and some among them successfully demonstrated fabrication of graphite structures in diamond. Recently, we succeeded to control the depth of the micrometer-scaled processed layer by changing energy of the focused ions.These techniques would be applicable to form defects of fluorescent centers in diamond by precise control of PBW microprobe.23rd International Workshop on Inelastic Ion-Surface Collisions (IISC-23
