Energetics and dynamics in the reaction of Si+ with SiF4. Thermochemistry of SiFx and SiFx+ (x=1,2,3)

Abstract

Journal ArticleThe title reaction is studied using guided ion beam mass spectrometry. Absolute reaction cross sections are measured as a function of kinetic energy from thermal to 40 eV, and three endothermic product channels are observed. The dominant SiF+ + SiF3 channel is only slightly endothermic, while the SiF3+ + SiF and SiF2+ + SiF2 channels have much higher thresholds. The SiF3 + cross section magnitude is about half that of SiF+, while the SiF2+ cross section is an order of magnitude smaller than that of SiF+

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