Radio-frequency magnetron sputtering A versatile tool for CdSe quantum dots depositions with controlled properties

Abstract

International audienceCdSe nanoparticles are of great interest for many applications. However, their size, shape, and aggregation are still difficult to control by the conventional synthesis methods. Here, we report on the synthesis of CdSe quantum dots (QDs), with an average diameter less than 10 nm, using radio-frequency magnetron sputtering (RFMS) on glass and silicon substrates at 25 °C. First, results show that a target-substrate distance of 13.5 cm and a chamber pressure of 2.2.10-1 mbar were required to deposit a CdSe QDs layer on the substrates. The morphology and optical properties of CdSe QDs were then studied as a function of RF power and deposition time. The size of CdSe QDs increases with increasing both the RF power and the deposition time. UV-visible spectroscopy shows that the CdSe QDs layer deposited on the glass-substrate by RFMS has almost the same optical properties as the one obtained from commercial CdSe QDs solutions. In both cases, a shift of the characteristic absorption band of CdSe QDs towards the higher wavenumbers is observed with the QDs size increase. AFM confirms the success of CdSe QDs layer deposition by RFMS CdSe QDs with a mean diameter of 7.5 ± 2 nm were observed for a RF power of 14 W, a chamber pressure of 2.2.10-1 mbar, a target-substrate distance of 13.5 cm and a deposition time of 7.5 min (optimal values). With these parameters, the coverage of the substrate by the nano-objects is estimated at 25-30 % of the overall surface