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thesis
Pulsed plasma enhanced chemical vapor deposition of fluorocarbon thin films for dielectric applications
Authors
Catherine B., 1972- Labelle
Publication date
1 January 1999
Publisher
Massachusetts Institute of Technology
Abstract
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1999.Includes bibliographical references.by Catherine B. Labelle.Ph.D
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Last time updated on 18/03/2014
