INFRARED ELLPSOMETER/ POLARMETER SYSTEM, METHOD OF CALIBRATION, AND USE THEREOF

Abstract

A sample system investigation system, such as an ellipsometer or polarimeter system, for use in investigating sample systems with electromagnetic wavelengths in the infrared range, and a calibration method for compensating nonidealities in multi-dimensional system rotated and non-rotated component representing matricies, are disclosed. An essentially achromatic compensator of dual-rhomb construction, which introduces a (3*LAMBDA/4) phase shift, but essentially no deviation in the direction of propagation of a polarized beam of electromagnetic wavelengths caused to pass there through, even when said compensator is caused to continuously rotate, is also disclosed

    Similar works