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Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization
Authors
S. Arscott
C. Boyaval
+8 more
K. Daffe
G. Dambrine
S. Eliet
A. El Fellahi
B. Grandidier
K. Haddadi
J. Marzouk
T. Xu
Publication date
10 October 2017
Publisher
'Institute of Electrical and Electronics Engineers (IEEE)'
Doi
Cite
Abstract
International audienc
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oai:HAL:hal-01726555v1
Last time updated on 14/04/2021
Crossref
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info:doi/10.23919%2Feumc.2017....
Last time updated on 06/08/2021
Archive Ouverte en Sciences de l'Information et de la Communication
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oai:HAL:hal-02345414v1
Last time updated on 11/12/2019