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Influence of the Plasma Chemistry on the Composition of ZrOx and NbOx Thin Films Deposited by Reactive Magnetron Sputtering
Authors
A Hecq
AJ Stirling
+22 more
C Lee
CG Granqvist
CM Lampert
EW McDaniel
GR Doughty
I Petrov
I Petrov
JM Ngaruiya
Jochen M. Schneider
JT Gudmundsson
K Tominaga
KVSR Apparao
M Hecq
P Kathirgamanathan
R Snyders
R Snyders
S Berg
S Venkataraj
S Venkataraj
Stanislav Mráz
T Troczynski
Y Saito
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Publisher
'Springer Science and Business Media LLC'
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Abstract
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Last time updated on 11/12/2019