CORE
🇺🇦Â
 make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Patterning highly ordered arrays of complex nanofeatures through EUV directed polarity switching of non chemically amplified photoresist
Authors
BA Samia
C Dana
+41Â more
CN Anderson
CN Anderson
CT Victor
DR Claudio
F Bernard
F Gibbons
FS Robert
G Jochen
G Ramakrishnan
H Sumio
H Tsubaki
I Takashi
IB Baek
IT Peter
K Maruyama
KE Gonsalves
KJ Lawrie
L Chen
LB Kimberly
M Seong-Yun
M Wang
P Naulleau
PK Kulshreshtha
PS Daniel
R Bonam
R Murillo
RF Pease
RS Brian
S Ma
S Mathieu
T Itani
TW Ebbesen
V Ankur
V Kalyani
V Singh
V Singh
VSV Satyanarayana
VSV Satyanarayana
X Chen
Y Anguang
Y Jinxing
Publication date
Publisher
'Springer Science and Business Media LLC'
Doi
Cite
Abstract
Abstract is not available.
Similar works
Full text
Available Versions
Crossref
See this paper in CORE
Go to the repository landing page
Download from data provider
info:doi/10.1038%2Fsrep22664
Last time updated on 11/12/2019