Dual-gate self-aligned IGZO TFTs monolithically integrated with high-temperature bottom moisture barrier for flexible AMOLED

Akkerman, Hylke B; Bel, T; Chiang, Shin Chuan; Dehaene, W; Diesen-Tempelaars, Karin  van; Gelinck, G Gerwin; Genoe, Jan; Haas, Gerard  de; Huang, Yen Yu; Kronemeijer, Auke Jisk; Lu, Ya Ju; Maas, JWJ Joris; Nag, Manoj; Panditha, Pradeep; Pendyala, Raghu K; Riet, Joris  de; Rovers, Madelon; Steen, JL  van der; Steudel, Sören; Verbeek, R GFA; Verschueren, Lynn; Yeh, Ming Hua

Dual-gate self-aligned IGZO TFTs monolithically integrated with high-temperature bottom moisture barrier for flexible AMOLED

Authors: Hylke B Akkerman
T Bel
Shin Chuan Chiang
W Dehaene
Karin van Diesen-Tempelaars
G Gerwin Gelinck
Jan Genoe
Gerard de Haas
Yen Yu Huang
Auke Jisk Kronemeijer
Ya Ju Lu
JWJ Joris Maas
Manoj Nag
Pradeep Panditha
Raghu K Pendyala
Joris de Riet
Madelon Rovers
JL van der Steen
Sören Steudel
R GFA Verbeek
Lynn Verschueren
Ming Hua Yeh
Publication date: 1 January 2018
Publisher: 'Royal College of Obstetricians & Gynaecologists (RCOG)'

Abstract

\u3cp\u3eWe present a 350°C self-aligned dual-gate a-IGZO backplane technology with a monolithically integrated multi-layer high-temperature thin-film barrier for flexible AMOLED. Thin-film barrier properties and TFT technology are optimized on 320 x 352mm substrates, and demonstrated in a flexible QQVGA 100 ppi AMOLED display prototype.\u3c/p\u3

Similar works

Full text

Available Versions

Repository TU/e

oai:library.tue.nl:904482

Last time updated on 06/12/2019