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A microacoustic analysis including viscosity and thermal conductivity to model the effect of the protective cap on the acoustic response of a MEMS microphone
Authors
A. Dehé
A. J. Zuckerwar
+5 more
D. Homentcovschi
J. Alblas
P. V. Loeppert
R. N. Miles
W. Beltman
Publication date
Publisher
'Springer Science and Business Media LLC'
Doi
Abstract
Abstract is not available.
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info:doi/10.1007%2Fs00542-013-...
Last time updated on 04/12/2019
