Metaheuristics for scheduling jobs with incompatible families on parallel batching machines

Abstract

In this paper, we discuss the scheduling of jobs with incompatible families on parallel batching machines. The performance measure is total weighted tardiness. This research is motivated by a scheduling problem found in the diffusion and oxidation areas of semiconductor wafer fabrication where the machines can be modelled as parallel batch processors. Given that this scheduling problem is NP-hard, we suggest an ant colony optimization (ACO) and a variable neighbourhood search (VNS) approach. Both metaheuristics are hybridized with a decomposition heuristic and a local search scheme. We compare the performance of the two algorithms with that of a genetic algorithm (GA) based on extensive computational experiments. The VNS approach outperforms the ACO and GA approach with respect to time and solution quality.