Electrochemical sensors are important candidates for
autonomous integrated sensing applications. Such sensors
can provide accurate and long-term measurements of
multiple analyte for applications in complex environments
e.g. in body fluids. As such sensors are made smaller and
need to be fully integrated, special approaches need to be
taken in order to achieve functional sensitivity, stability,
and longevity. Here, we provide details of CMOS
compatible, integrated design and fabrication of these
sensors on very small scales using micro/nano scale
fabrication and surface modification techniques. We also
present in situ functionalization and novel interface design
techniques. We also provide a comparison between
integrated reference electrodes fabricated using CMOS
compatible fabrication techniques. Finally, we show
examples of sensing Glucose and DNA concentration in
biological samples
