Nanocrystallin CdS films with controlled stoichiometry deposited by CSVS were investigated by meth-od of the current-voltage characteristics in ITO/CdS /In structures. It was shown that in the case of cadmi-um excess (S Cd) charge flow mechanism is deter-mined by monomolecular recombination. In the band gap of CdS with excess of cadmium there was detect-ed localized states with energy Et = 0.514 ± 0.026 eV, while in the material with Excess sulfur there are two localized states with energy Et1 = 0.514 ± 0.026 eV and Et2 = 0.700 ± 0.026 eV. Full concentration of lo-calized states is more than 2·1021 m-3 – 5·1022 m-3. Dependence of injection in parameters and nature of in-jection in the structures based on nanostructured CdS films on their stoichiometry was determined
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