Ti-V-Zr-Nb-Hf metallic and nitride films were deposited by filtered vacuum arc plasma from a single
equiatomic HEA cathode. The composition, microstructure, mechanical properties, thermal stability and
corrosion properties were investigated.
The deposited metallic film has a two-phase structure with bcc and hcp-lattice. The nitride films were
found to have only an fcc structure. All coatings have nano-grained structures, with grain sizes 5 nm for
metallic and 36 nm for nitride. The nitride coatings have a compressive stress of around – 12,5 GPa, high
hardness ~ 40 GPa and elastic modulus ~ 450 GPa. After annealing in vacuum in range 400-1200 °C, 3 h
for every temperature, hardness decreased to 25 GPa. It was found that both the metallic and nitride coatings
exhibited their best corrosion resistance than steel samples in a 3,5 wt. % NaCl solution. The metallic
coatings showed better corrosion resistance than the nitride coatings.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/3532

Belous, V.A.

Firstov, S.A.

Gorban, V.F.

Kholomeev, M.G.

Kuprin, A.S.

Ovcharenko, V.D.

Reshetnyak, E.N.

Tolmachova, G.N.

SocioEconomic Challenges Journal (Sumy State University)

PROCEEDINGS OF THE INTERNATIONAL CONFERENCE  
NANOMATERIALS: APPLICATIONS AND PROPERTIES 
Vol. 2 No 2, 02FNC12(3pp) (2013) 
 
 
2304-1862/2013/2(2)02FNC12(3) 02FNC12-1  2013 Sumy State University 
Properties of Coatings Deposited from Filtered Vacuum Arc Plasma with HEA Cathode 
 
V.A. Belous1, S.A. Firstov2, V.F. Gorban2, A.S. Kuprin1*, V.D. Ovcharenko1, E.N. Reshetnyak1, 
G.N. Tolmachova1, M.G. Kholomeev1 
 
1 National Science Center “Kharkov Institute of Physics and Technology”, 1, Akademicheskaya Str.,  
Kharkov, Ukraine  
2 I. Frantsevich Institute for Problems of Materials Science, National Academy of Sciences of Ukraine,  
Kyiv, Ukraine 
 
(Received 27 May 2013; published online 31 August 2013) 
 
Ti-V-Zr-Nb-Hf metallic and nitride films were deposited by filtered vacuum arc plasma from a single 
equiatomic HEA cathode. The composition, microstructure, mechanical properties, thermal stability and 
corrosion properties were investigated.  
The deposited metallic film has a two-phase structure with bcc and hcp-lattice. The nitride films were 
found to have only an fcc structure. All coatings have nano-grained structures, with grain sizes 5 nm for 
metallic and 36 nm for nitride. The nitride coatings have a compressive stress of around – 12,5 GPa, high 
hardness  40 GPa and elastic modulus  450 GPa. After annealing in vacuum in range 400-1200 °C, 3 h 
for every temperature, hardness decreased to 25 GPa. It was found that both the metallic and nitride coat-
ings exhibited their best corrosion resistance than steel samples in a 3,5 wt. % NaCl solution. The metallic 
coatings showed better corrosion resistance than the nitride coatings. 
 
Keywords: Filtered vacuum arc, High-entropy alloy, Nanostructured coatings, Hardness, Thermal stability, 
Corrosion. 
 
 PACS numbers: 81.15.Cd, 81.15. – z, 81.40.Cd, 
68.60.Dv, 81.65.Kn 
 
 
                                                        
* kuprin@kipt.kharkov.ua 
1. INTRODUCTION 
 
Ion plasma modification techniques commonly used 
to enhance the processing tool because of increasing the 
surface hardness, improved thermal stability and cor-
rosion resistance. A coating on the basis of high entro-
py alloys (HEA) contained ≥ 5 elements in equiatomic 
ratio, which concept was proposed in [1], is one way to 
further improve the surface properties. HEA have high 
entropy of mixing, and as a result a minimum of Gibbs 
energy, which determines the stability of their struc-
ture, composition and high performance. 
Implementation of this approach applied to the 
magnetron nitride coatings based on HEA showed that, 
depending on the partial pressure of nitrogen in an 
argon-nitrogen mixture can form coatings in an amor-
phous or single-phase crystal structure, such coatings 
also have high mechanical properties [2, 3]. These coat-
ings may also be applied as diffusion barrier for copper 
metallization [4]. 
So far, the deposition of multi-component coating 
vacuum-arc method carries out several cathodes [5] or 
with the aid of a HEA cathode [6] without plasma fil-
tering from the particles generated by the cathode spot. 
The purpose of this paper is to study the structure 
and properties of coatings obtained from filtered vacu-
um arc plasma flow of one cathode, made from alloy of 
Ti-V-Zr-Nb-Hf. 
 
2. EXPERIMENT 
 
The coatings were deposited by vacuum arc method 
from filtered plasma flow [7] at substrate of steel 
08Cr18Ni10Ti and steel (C: 0.14-0.12; Mn: 0.40-0.65; 
Si: 0.12-0.30; S:  0.055; P:  0.050, wt. %). The cathode 
of high entropy alloy system Ti-V-Zr-Nb-Hf was pre-
pared by vacuum arc melting in an atmosphere of high 
purity argon. Arc current was ~ 122 A, metal coatings 
were deposited at an argon pressure of 0.05 Pa and a 
substrate bias voltage Ub  – 50 V, nitride – at a nitro-
gen pressure of 0.3 Pa and a bias voltage of  
Ub  – 100 V. 
Composition of the cathode and coatings was deter-
mined by EDX method on scanning electron microscope 
JSM-7001F and by X-ray fluorescence method. Morphol-
ogy of the coatings investigated by SEM method. The 
phase composition and substructure of coatings were 
studied by X-ray analysis on a DRON-3 diffractometer in 
the filtered radiation from a copper anode. The pro-
cessing of diffraction patterns produced by a computer 
program New Profile. The crystallite size was deter-
mined from the broadening of the lines from the Selya-
kov-Scherrer relation. The hardness measurements were 
carried out on coatings using a Nanoindenter G200 
equipped with a Berkovich diamond tip to penetration 
depth 300 nm by CSM method. Vacuum annealing at 
110 – 3 Pa for 3 hours at temperatures of 400, 600, 800, 
1000 and 1200 °C were  proceed by to determine the 
thermal stability of coatings. Corrosion properties of the 
coatings were investigated by potentiodynamic method 
at IPC-Pro potentiostat in 3,5 % NaCl solution. 
 
3. RESULTS AND DISCUSSION 
 
3.1 Composition and Morphology of the Coatings. 
 
The composition of metal coatings, as shown in  
Table 1, is somewhat different from the composition of 
 V.A. BELOUS, S.A. FIRSTOV, A.S. KUPRIN, ET AL. PROC. NAP 2, 02FNC12 (2013) 
 
 
02FNC12-2 
the cathode: reduced content of heavy elements and 
increased content of lighter. This is all about the metal 
plasma flow separation system. Multicomponent nitride 
is formed with almost equal ratio of metal and nitrogen 
components after nitrogen flooding into the vacuum 
chamber during deposition. In the nitride coating metal 
components ratio is also distinguished from the cathode. 
In this case, not only a separation of the metal compo-
nents of the plasma is determine the coating composi-
tion, but its scattering by the gas target, as well as 
changes in the conditions of existence of the cathode 
spot on the surface of the cathode. 
 
Table 1 – The composition of the cathode and coatings. 
 
Elements 
The concentration of elements at. % 
cathode 
metallic 
coating 
nitride 
coating 
Ti 25 31,5 24 
Zr 25 16,6 15 
Nb 25 20,1 6 
V 10 24,2 8,3 
Hf 15 7,6 1,3 
N – – 45,4 
 
The morphology of the metal and nitride coatings 
surface according to SEM is characterized by the cellu-
lar structure (average cell size is ~ 3  3 m), with a 
small amount of particulate matter, which is typical for 
coatings obtained by a stream of filtered vacuum arc 
plasma. 
 
3.2 Coatings Structure 
 
As follows from [6] the cathode is characterized by 
coarse-grained bcc-structure with a lattice parameter of 
0.3358 nm, which is close to the value of 0.3315, calcu-
lated by Vegard's rule for solid solution of suitable 
composition. 
Coatings prepared in argon atmosphere, according 
to the X-ray diffractometer geometry, unlike the cath-
ode is likely not a single-phase. The coating main 
phase, as a cathode, is bcc solid solution with a strong 
structure and an axial texture with [100] axis in the 
direction normal to the coating surface. This phase has 
the intense and rather broad line (200), located near 
55 degrees on the θ-2θ coating diffraction pattern. The 
average crystallite size in the texture axis direction 
calculated from the broadening of the line by Scherrer 
formula is 5 nm. Value of the bcc crystal lattice period 
is 0,3333  0,0005 nm. 
The second, more weak and broad line, available at 
X-ray diffraction near 40 degrees, dose not corresponds 
to the detected solid solution bcc not by the angular 
position nor by width. Most likely, this is the line (011), 
which belongs to the solid solution with the hcp-lattice. 
The average crystallite size of this phase is about 2 nm. 
These results differ from the data [6], according to 
which arc evaporation of high entropy cathode system -
Ti-V-Zr-Nb-Hf with bcc-crystal lattice in vacuum (re-
sidual atmosphere pressure is 0.0066 Pa), and without 
separation of the plasma stream, led to the formation of 
coatings with preserved single-phase, i.e., bcc-lattice 
and strong texture with the [110] direction. 
In the coating, received in a nitrogen atmosphere, 
formed textured fcc single phase structure. At coating 
diffraction pattern can be seen a quite narrow and very 
intense lines of this phase type (hhh). Rocking curve of 
(111) reflection indicates that the coating is formed 
with an [111] axis axial texture in the direction normal 
to the substrate surface, and a texture scattering angle 
of 10°. An X-ray coating tensometry revealed high com-
pressive residual stress. Stresses calculated for Young's 
modulus E  450 GPa (the result of nanoindentation) 
and Poisson's ratio   0,2 [8] are 12,5 GPa. In a re-
laxed cross-section fcc crystal lattice period, equal to 
(0,4385  0,0003) nm within the measurement error, 
matches on the same value 0.4389 nm calculated by 
Vegard's rule for a solid solution of the corresponding 
nitrides. Crystallite size of this phase is about 36 nm. 
In the nitride coating annealing process observed 
recrystallization, wherein the phase composition of the 
coating is not changed, and the level of residual stress 
is reduced to – 1,8 GPa. 
 
3.3 Hardness and Thermal Stability of Coatings 
 
The hardness of the metal coating is H  9 GPa and 
Young's modulus E  120 GPa, which corresponds to the 
values of bulk high entropy alloys [9] and magnetron 
coatings obtained in an argon atmosphere [10]. 
 
 
 
Fig 1 – Hardness and Young modulus of the coatings as a 
function of annealing temperature 
 
The coating obtained in a nitrogen atmosphere, has a 
higher hardness ≈ 40 GPa and a Young's modulus 
≈ 450 GPa, which are usual for titanium nitride and nio-
bium deposited by vacuum-arc method. One of the factors 
affecting this coating hardness is a high internal com-
pressive stress value. Reduction of hardness and Young's 
modulus after vacuum annealing begins at temperatures 
above 600 °C, due to relaxation of internal stresses in the 
coating and the start of recrystallization. 
When the annealing temperature is 1000-1200 °C 
the hardness and Young's modulus are at 25 and 
320 GPa, respectively. 
 
3.4 Corrosion resistance. 
 
Potentiodynamic tests results are shown in Fig. 2. The 
graph shows that the corrosion potentials of coated steel is 
higher than the potential of the original substrate. 
 PROPERTIES OF COATINGS DEPOSITED FROM FILTERED VACUUM ARC PLASMA… PROC. NAP 2, 02FNC12 (2013) 
 
 
02FNC12-3 
 
 
Fig. 2 – Corrosion resistance of coatings in a solution of 3,5 % 
NaCl 
 
Extrapolation of the potentiodynamic curves cathodic 
part shows the influence of the type of coating on the 
steel corrosion rate (Table 2). 
 
Table 2 – Data from polarization corrosion tests 
 
Sample Ucorr, mV Icorr, mА/сm2 
steel – 658 1,5∙10 – 5 
metallic coating – 614 3∙10 – 7 
nitride coating – 568 6∙10 – 6 
 
Despite the fact that the corrosion potential of a ni-
tride coating above the corrosion potential of the metal 
coating, the corrosion rate in the last less than an order 
of magnitude. This fact suggests that the metal coating 
is obtained in an argon atmosphere more corrosion-
resistant. The reason for the reduced corrosion re-
sistance of nitride coating over the metal can be very 
high internal stresses which cause accelerated corrosion 
under stress. 
 
4. CONCLUSIONS 
 
Applying of metal and metal nitride filtering plasma 
deposition coatings using cathode of high entropy alloy 
Ti-V-Zr-Nb-Hf significantly improves the surface mor-
phology, but leads to a slight change in the composition of 
the condensate. 
A metallic coating deposited in such conditions is not 
likely phased. Along with the bcc-structured solid solu-
tion a hcp-lattice solid solution is formed therein. In the 
nitride coatings a single-phase fcc-textured structure 
with a high compressive residual stress (12,5 GPa) is 
formed. 
The metal coating has typical mechanical properties 
of such alloys (N  9 GPa, E  120 GPa). Nitride coating 
is characterized by high hardness H  40 GPa, which 
remains stable during vacuum annealing up to 600 °C 
and decreased to 25 GPa at 1200 °C, which is followed 
from a decrease in internal stress and recrystallization 
processes. 
The metal coating has higher corrosion resistance 
compared to nitride one and a 1,5-order decrease the cor-
rosion rate of steel in solution 3,5 % NaCl. 
 
REFERENCES 
 
1. Y.Y. Chen, U.T. Hong, J.W. Yeh, H.C. Shih, Scr. Mater. 
54, 1997 (2006). 
2. Ping-Kang Huang, Jien-Wei Yeh, Surf. Coat. Technol. 203, 
1891 (2009). 
3. H.W. Chang, P.K. Huang, J.W. Yeh, A. Davison, 
C.H. Tsau, C.C. Yang, Surf. Coat. Technol. 202, 3360 
(2008). 
4. S.Y. Chang, M.K. Chen, Thin Solid Films 517, 4961 
(2009). 
5. I.V. Blinkov, А.О. Vоlkhоnsкiy, V.N. Аnikin, М.I. Pеtrjik, 
D.E. Dеrеvcоvа, Phys. Chem. Mater. Treatment No 4, 37 
(2010). [in Russian]. 
6. O.V. Sobol’, A.A. Andreev, V.F. Gorban’, N.A. Krapivka, et 
al., Tech. Phys. Lett. 38, 41 (2012). 
7. I.I. Aksenov, V.M. Khoroshikh, Proc. TATF”98, 283 (Re-
gensburg, Germany: 1998). 
8. G. Abadias, Surf. Coat Technol. 202, 2223 (2008). 
9. S.А. Firstov, V.F. Gorban, N.А. Krаpivka, et al., 
Sоvremenny problemy fizicheskogo materialovedenya: Sb. 
nauchn. tr. 18, 140 (K.: IPM NAS Ukraine: 2009). [in Rus-
sian]. 
10. Ming-Hung Tsai, Chia-Han Lai, Jien-Wei Yeh, Jon-Yiew 
Gan, J. Phys. D: Appl. Phys. 41, (2008). 
 
 


English

Properties of Coatings Deposited from Filtered Vacuum Arc Plasma with HEA Cathode

Electronic Sumy State University Institutional Repository

PROCEEDINGS OF THE INTERNATIONAL CONFERENCE  NANOMATERIALS: APPLICATIONS AND PROPERTIES Vol. 2 No 2, 02FNC12(3pp) (2013)   2304-1862/2013/2(2)02FNC12(3) 02FNC12-1  2013 Sumy State University Properties of Coatings Deposited from Filtered Vacuum Arc Plasma with HEA Cathode  V.A. Belous1, S.A. Firstov2, V.F. Gorban2, A.S. Kuprin1*, V.D. Ovcharenko1, E.N. Reshetnyak1, G.N. Tolmachova1, M.G. Kholomeev1  1 National Science Center “Kharkov Institute of Physics and Technology”, 1, Akademicheskaya Str.,  Kharkov, Ukraine  2 I. Frantsevich Institute for Problems of Materials Science, National Academy of Sciences of Ukraine,  Kyiv, Ukraine  (Received 27 May 2013; published online 31 August 2013)  Ti-V-Zr-Nb-Hf metallic and nitride films were deposited by filtered vacuum arc plasma from a single equiatomic HEA cathode. The composition, microstructure, mechanical properties, thermal stability and corrosion properties were investigated.  The deposited metallic film has a two-phase structure with bcc and hcp-lattice. The nitride films were found to have only an fcc structure. All coatings have nano-grained structures, with grain sizes 5 nm for metallic and 36 nm for nitride. The nitride coatings have a compressive stress of around – 12,5 GPa, high hardness  40 GPa and elastic modulus  450 GPa. After annealing in vacuum in range 400-1200 °C, 3 h for every temperature, hardness decreased to 25 GPa. It was found that both the metallic and nitride coat-ings exhibited their best corrosion resistance than steel samples in a 3,5 wt. % NaCl solution. The metallic coatings showed better corrosion resistance than the nitride coatings.  Keywords: Filtered vacuum arc, High-entropy alloy, Nanostructured coatings, Hardness, Thermal stability, Corrosion.   PACS numbers: 81.15.Cd, 81.15. – z, 81.40.Cd, 68.60.Dv, 81.65.Kn                                                           * kuprin@kipt.kharkov.ua 1. INTRODUCTION  Ion plasma modification techniques commonly used to enhance the processing tool because of increasing the surface hardness, improved thermal stability and cor-rosion resistance. A coating on the basis of high entro-py alloys (HEA) contained ≥ 5 elements in equiatomic ratio, which concept was proposed in [1], is one way to further improve the surface properties. HEA have high entropy of mixing, and as a result a minimum of Gibbs energy, which determines the stability of their struc-ture, composition and high performance. Implementation of this approach applied to the magnetron nitride coatings based on HEA showed that, depending on the partial pressure of nitrogen in an argon-nitrogen mixture can form coatings in an amor-phous or single-phase crystal structure, such coatings also have high mechanical properties [2, 3]. These coat-ings may also be applied as diffusion barrier for copper metallization [4]. So far, the deposition of multi-component coating vacuum-arc method carries out several cathodes [5] or with the aid of a HEA cathode [6] without plasma fil-tering from the particles generated by the cathode spot. The purpose of this paper is to study the structure and properties of coatings obtained from filtered vacu-um arc plasma flow of one cathode, made from alloy of Ti-V-Zr-Nb-Hf.  2. EXPERIMENT  The coatings were deposited by vacuum arc method from filtered plasma flow [7] at substrate of steel 08Cr18Ni10Ti and steel (C: 0.14-0.12; Mn: 0.40-0.65; Si: 0.12-0.30; S:  0.055; P:  0.050, wt. %). The cathode of high entropy alloy system Ti-V-Zr-Nb-Hf was pre-pared by vacuum arc melting in an atmosphere of high purity argon. Arc current was ~ 122 A, metal coatings were deposited at an argon pressure of 0.05 Pa and a substrate bias voltage Ub  – 50 V, nitride – at a nitro-gen pressure of 0.3 Pa and a bias voltage of  Ub  – 100 V. Composition of the cathode and coatings was deter-mined by EDX method on scanning electron microscope JSM-7001F and by X-ray fluorescence method. Morphol-ogy of the coatings investigated by SEM method. The phase composition and substructure of coatings were studied by X-ray analysis on a DRON-3 diffractometer in the filtered radiation from a copper anode. The pro-cessing of diffraction patterns produced by a computer program New Profile. The crystallite size was deter-mined from the broadening of the lines from the Selya-kov-Scherrer relation. The hardness measurements were carried out on coatings using a Nanoindenter G200 equipped with a Berkovich diamond tip to penetration depth 300 nm by CSM method. Vacuum annealing at 110 – 3 Pa for 3 hours at temperatures of 400, 600, 800, 1000 and 1200 °C were  proceed by to determine the thermal stability of coatings. Corrosion properties of the coatings were investigated by potentiodynamic method at IPC-Pro potentiostat in 3,5 % NaCl solution.  3. RESULTS AND DISCUSSION  3.1 Composition and Morphology of the Coatings.  The composition of metal coatings, as shown in  Table 1, is somewhat different from the composition of  V.A. BELOUS, S.A. FIRSTOV, A.S. KUPRIN, ET AL. PROC. NAP 2, 02FNC12 (2013)   02FNC12-2 the cathode: reduced content of heavy elements and increased content of lighter. This is all about the metal plasma flow separation system. Multicomponent nitride is formed with almost equal ratio of metal and nitrogen components after nitrogen flooding into the vacuum chamber during deposition. In the nitride coating metal components ratio is also distinguished from the cathode. In this case, not only a separation of the metal compo-nents of the plasma is determine the coating composi-tion, but its scattering by the gas target, as well as changes in the conditions of existence of the cathode spot on the surface of the cathode.  Table 1 – The composition of the cathode and coatings.  Elements The concentration of elements at. % cathode metallic coating nitride coating Ti 25 31,5 24 Zr 25 16,6 15 Nb 25 20,1 6 V 10 24,2 8,3 Hf 15 7,6 1,3 N – – 45,4  The morphology of the metal and nitride coatings surface according to SEM is characterized by the cellu-lar structure (average cell size is ~ 3  3 m), with a small amount of particulate matter, which is typical for coatings obtained by a stream of filtered vacuum arc plasma.  3.2 Coatings Structure  As follows from [6] the cathode is characterized by coarse-grained bcc-structure with a lattice parameter of 0.3358 nm, which is close to the value of 0.3315, calcu-lated by Vegard's rule for solid solution of suitable composition. Coatings prepared in argon atmosphere, according to the X-ray diffractometer geometry, unlike the cath-ode is likely not a single-phase. The coating main phase, as a cathode, is bcc solid solution with a strong structure and an axial texture with [100] axis in the direction normal to the coating surface. This phase has the intense and rather broad line (200), located near 55 degrees on the θ-2θ coating diffraction pattern. The average crystallite size in the texture axis direction calculated from the broadening of the line by Scherrer formula is 5 nm. Value of the bcc crystal lattice period is 0,3333  0,0005 nm. The second, more weak and broad line, available at X-ray diffraction near 40 degrees, dose not corresponds to the detected solid solution bcc not by the angular position nor by width. Most likely, this is the line (011), which belongs to the solid solution with the hcp-lattice. The average crystallite size of this phase is about 2 nm. These results differ from the data [6], according to which arc evaporation of high entropy cathode system -Ti-V-Zr-Nb-Hf with bcc-crystal lattice in vacuum (re-sidual atmosphere pressure is 0.0066 Pa), and without separation of the plasma stream, led to the formation of coatings with preserved single-phase, i.e., bcc-lattice and strong texture with the [110] direction. In the coating, received in a nitrogen atmosphere, formed textured fcc single phase structure. At coating diffraction pattern can be seen a quite narrow and very intense lines of this phase type (hhh). Rocking curve of (111) reflection indicates that the coating is formed with an [111] axis axial texture in the direction normal to the substrate surface, and a texture scattering angle of 10°. An X-ray coating tensometry revealed high com-pressive residual stress. Stresses calculated for Young's modulus E  450 GPa (the result of nanoindentation) and Poisson's ratio   0,2 [8] are 12,5 GPa. In a re-laxed cross-section fcc crystal lattice period, equal to (0,4385  0,0003) nm within the measurement error, matches on the same value 0.4389 nm calculated by Vegard's rule for a solid solution of the corresponding nitrides. Crystallite size of this phase is about 36 nm. In the nitride coating annealing process observed recrystallization, wherein the phase composition of the coating is not changed, and the level of residual stress is reduced to – 1,8 GPa.  3.3 Hardness and Thermal Stability of Coatings  The hardness of the metal coating is H  9 GPa and Young's modulus E  120 GPa, which corresponds to the values of bulk high entropy alloys [9] and magnetron coatings obtained in an argon atmosphere [10].    Fig 1 – Hardness and Young modulus of the coatings as a function of annealing temperature  The coating obtained in a nitrogen atmosphere, has a higher hardness ≈ 40 GPa and a Young's modulus ≈ 450 GPa, which are usual for titanium nitride and nio-bium deposited by vacuum-arc method. One of the factors affecting this coating hardness is a high internal com-pressive stress value. Reduction of hardness and Young's modulus after vacuum annealing begins at temperatures above 600 °C, due to relaxation of internal stresses in the coating and the start of recrystallization. When the annealing temperature is 1000-1200 °C the hardness and Young's modulus are at 25 and 320 GPa, respectively.  3.4 Corrosion resistance.  Potentiodynamic tests results are shown in Fig. 2. The graph shows that the corrosion potentials of coated steel is higher than the potential of the original substrate.  PROPERTIES OF COATINGS DEPOSITED FROM FILTERED VACUUM ARC PLASMA… PROC. NAP 2, 02FNC12 (2013)   02FNC12-3   Fig. 2 – Corrosion resistance of coatings in a solution of 3,5 % NaCl  Extrapolation of the potentiodynamic curves cathodic part shows the influence of the type of coating on the steel corrosion rate (Table 2).  Table 2 – Data from polarization corrosion tests  Sample Ucorr, mV Icorr, mА/сm2 steel – 658 1,5∙10 – 5 metallic coating – 614 3∙10 – 7 nitride coating – 568 6∙10 – 6  Despite the fact that the corrosion potential of a ni-tride coating above the corrosion potential of the metal coating, the corrosion rate in the last less than an order of magnitude. This fact suggests that the metal coating is obtained in an argon atmosphere more corrosion-resistant. The reason for the reduced corrosion re-sistance of nitride coating over the metal can be very high internal stresses which cause accelerated corrosion under stress.  4. CONCLUSIONS  Applying of metal and metal nitride filtering plasma deposition coatings using cathode of high entropy alloy Ti-V-Zr-Nb-Hf significantly improves the surface mor-phology, but leads to a slight change in the composition of the condensate. A metallic coating deposited in such conditions is not likely phased. Along with the bcc-structured solid solu-tion a hcp-lattice solid solution is formed therein. In the nitride coatings a single-phase fcc-textured structure with a high compressive residual stress (12,5 GPa) is formed. The metal coating has typical mechanical properties of such alloys (N  9 GPa, E  120 GPa). Nitride coating is characterized by high hardness H  40 GPa, which remains stable during vacuum annealing up to 600 °C and decreased to 25 GPa at 1200 °C, which is followed from a decrease in internal stress and recrystallization processes. The metal coating has higher corrosion resistance compared to nitride one and a 1,5-order decrease the cor-rosion rate of steel in solution 3,5 % NaCl.  REFERENCES  1. Y.Y. Chen, U.T. Hong, J.W. Yeh, H.C. Shih, Scr. Mater. 54, 1997 (2006). 2. Ping-Kang Huang, Jien-Wei Yeh, Surf. Coat. Technol. 203, 1891 (2009). 3. H.W. Chang, P.K. Huang, J.W. Yeh, A. Davison, C.H. Tsau, C.C. Yang, Surf. Coat. Technol. 202, 3360 (2008). 4. S.Y. Chang, M.K. Chen, Thin Solid Films 517, 4961 (2009). 5. I.V. Blinkov, А.О. Vоlkhоnsкiy, V.N. Аnikin, М.I. Pеtrjik, D.E. Dеrеvcоvа, Phys. Chem. Mater. Treatment No 4, 37 (2010). [in Russian]. 6. O.V. Sobol’, A.A. Andreev, V.F. Gorban’, N.A. Krapivka, et al., Tech. Phys. Lett. 38, 41 (2012). 7. I.I. Aksenov, V.M. Khoroshikh, Proc. TATF”98, 283 (Re-gensburg, Germany: 1998). 8. G. Abadias, Surf. Coat Technol. 202, 2223 (2008). 9. S.А. Firstov, V.F. Gorban, N.А. Krаpivka, et al., Sоvremenny problemy fizicheskogo materialovedenya: Sb. nauchn. tr. 18, 140 (K.: IPM NAS Ukraine: 2009). [in Rus-sian]. 10. Ming-Hung Tsai, Chia-Han Lai, Jien-Wei Yeh, Jon-Yiew Gan, J. Phys. D: Appl. Phys. 41, (2008).   

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Properties of Coatings Deposited from Filtered Vacuum Arc Plasma with HEA Cathode

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