The nonmonotonic dependence of the intensities of vibrational lines in the Raman scattering of TiO2 nanofilms, including Ag and Au nanoparticles, from the irradiation dose D by Ti+ (140 keV) ions was estab-lished. The increase of the intensity in 1.3-1.5 times for TiO2 films at D 1012 - 1013 ions/cm2 related with improved of films structure at low doses. The enhancement of low-frequency electronic bands with dose in-creasing was study. It was shown that the effect of plasmon is not a major and the vibrational-electronic interaction plays the main function.
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