The effect of substrate bias on the structural-phase and elastic stress-strained state during the formation
of vacuum-arc deposited nanostructural coatings of the Mo–N system has been studied. An increase
in the bias potential leads to (i) predominant [111] orientation of the growing molybdenum nitride
crystals with a NaCl-type cubic lattice (γ-Mo2N phase) and (ii) the appearance of a second phase with a
body-centered cubic crystal lattice that is characteristic of pure molybdenum. The elastically strained
(stressed) state of the coating is determined not only by the conditions of deposition, but also by the mechanical
properties of a substrate. In order to provide for formation of coatings in a high-elastic-strained
(stressed) state, it is necessary to deposit coatings onto substrates with high elastic modulus, which prevent
metal flow at the interface.
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