Coatings of aluminium oxide Al2O3 were obtained by micro-arc oxidation under different conditions of
deposition. They were analysed by such methods as: positron annihilation spectroscopy (PAS), Rutherford
backscattering (RBS), X-ray diffraction (XRD) and scanning electron microscopy with microanalysis (SEM
with EDS). Investigated samples showed good adhesion to the substrate, low concentration of nanopores in
the bulk. Content of amorphous phase in the coating was about 20 vol.%, and metastable -Al2O3 - Al2O3
phases about less than 10 vol.%. It was demonstrated that by varying of parameters of deposition, it is possible
to control the physical – mechanical properties of obtained coatings as well as their element composition
and surface morphology.
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