Füstöss, L.

Tóth, G.

English

Periodica Polytechnica (Budapest University of Technology and Economics)

COMPUTATION OF THE TRANSMISSION PROBABILITY OF COMPLEX SYSTEMS By L. FUSTOSS and G. TOTH Department of Physics, Technical University, Budapest (Received December 15, 1971) Presented by Prof. Dr. A. KO"YA The transmission probability in any direction through a duct connecting two large vessels is defined as the ratio of numbers of emerging to entering molecules. Usually it is determined under the following assumptions: the molecules pass through the duct independently of each other, their inter-collision is negligible, the reflection on the walls of the duct is diffusive (the angle of the reflection is independent of that of the incident). These assump-tions are seldom realized in real physical circumstances, but the deviations can generally be taken into account, for this reason it is worth to determine the transmission probability under the assumed "clear" circumstances. Theo-retical computations are, however, rather laborious even under these restrict-ing assumptions and only a few results are available even for the relatively simple case of a cylindrical tube. A usual computation method is by a Monte Carlo model on a computer, but on account of the high computing time it must be restricted to a few parameters. Therefore it is worth to search for simple methods giving acceptable results either by interpolation between available results or by tracing the problem back to the results on cylindrical tubes. OATLEY [1] was the first to show an acceptable method for computing the transmission probability of t",-o interconnected cylindrical tubes. The application of his method to combinations of cylindrical tubes of different cross-sections or to combinations of a tube and an orifice of different cross-sections is a little difficult. BALLANCE [2] presented an additive formula as the generalization of OATLEY'S result considering that the transmission proba-bilities through an element in direct and in the opposite direction generally are different. He takes the ratio of the two kinds of transmission probabilities equal to the ratio of the entrance areas of the element. It appears that his generalization is not consistent in every respect. In the following a descriptive model of the addition of transmission probabilities is shown, emphasizing the basic assumptions, to make the deviations from the OATLEy-BALLANCE method obvious. 156 L. FaSTOSS and G. T6TH The new computing method The transmission probability can be defined as follows: I, (1) where I is the net number of molecules per unit time that flow from a large reservoir into another one; NI and Nz are the numbers of molecules per unit time per unit cross-section that enter the openings of the system; A is the opening area. Our assumptions for the computation of the transmission probability of a complex system from those of their elements are the following: 1. Along the junction area of the connected elements the distribution of the molecules is uniform as if coming from a large reservoir. 2. For each connected element it is true that (2) where Rand L mean right and left and O'.R means the transmission probability of the element to the right. In computing the transmission probability of a complex system, nota-tions in Fig. 1 are applied where elements 1 and 2 are not necessarily cylindrical ~ ~ J ~7AL :AB N2AR cX./L OCR cX2L Fig. 1. Diagram of composite system tubes, but any element with known transmission probability; AB is the junc-tion area. O'.R can be determined by (1) as follows: (3) where N' is the number of molecules per unit time and unit area that flows to the right through the junction area. On the right side of (3) the number of molecules N' AB is composed of CO,HPVTATI01Y OF THE TRANSMISSION PROBABILITY 157 two parts, the one that arises from NlAL and the other from N 2A R. The part from NlAL is (N' A B)1 = Ni AL x1R + Nl A L x lR(l N1 ALxlR (1 - x 2R) ( 1- x1d + x2R )2 (1 - x1L)2 + ... = 1 NI AL x lR --------- (4) The sum in (4) means that in equilibrium, among the molecules crossing AB at any time there are the ones crossing for the first time, the ones crossing for the second time and so on. Similarly, the part from NzA R considering (2) is (5) Eq. (3) considering (4), (5) and (2) is 1 (Nl - Nz) AL cxR = (lVl - Nz) AB ---::1;------:;1;------+-- 1 cxIL cx2R Thus the transmission probability of the system is (6) (6) gives the known Oatley formula if AL = AB, CX1L = cx1R = Xl and XzR = = CXzL =X2' that is true for cylindrical tubes. Transmission probabilities computed by (6) are equal to those obtained by OATLEY or BALLANCE for simple geometries. However, deviation can be found in the most complicated geometry examined by BALLANCE, that of a cylindrical pipe ·with restricted openings and a central blocking plate (Fig. 2). L L/2 '------'-"=-----~., ! i2RO 2R t Fig. 2. Cylindrical pipe with the openings at both ends restricted and with a central blocking plate 158 L. FaSTOSS and C. TDTH The transmission probability for this system can be determined in the following steps with the new formula (6): A1 [ a) O'.Ra of the system in Fig. 3a from (6) - as X 1L = IX, xZR = - Eq. A2 (2) being true for both elements: -':11· = -"'-2· - is expressed as: A 1 .1 A1] A2 1 1 l. b) O'.Rb of the system in Fig. 3b IX2R is given by (7) is 1 i IAz I T + Az (: _ 2) + _A-=2_-_-_4"'-.1 + l. A1 Fig. 3. Diagram for the construction of the system shown in Fig. 2 (7) (8) c) The transmission probability of the cylindrical pipe ·with restricted orifice and central blocking plate in Fig. 2 as X 1L XzR is given by (8) and AB = A2 - A1 - is FA.) where =-~ A1 141 _. __ ...L __ _ FIX F I F-l ' BALLANCE'S formula for this geometry is 1 3 1 1 --=2--+--+----x B F Fx' (F -- 1) 0'. (9) (10) CO,UPUTATIO.Y OF THE TRA,YSJIISSIOS PROBABILITY 159 The difference of (10) and (9) is 1 1 l--x (ll) F(F -1)x (ll) is positive for all values of F> 1 and 0: < 1, therefore (XR > (XB' The (X values obtained from (9) and (10) for the geometry in Fig. 2 are shown in Figs 4a and 4b as compared to the Monte Carlo data of DAvIS [3]. A proper approximate fl?rmula for short cylindrical tubes is [4] 2 (12) (X=----L/R+2 which approximates the exact values from below, for this reason it can be IX 0,5~ 0,50 \: \ 0,~5 O,~O 0,35 0,30 0 IX 0,24 0,20 \ 0,15 0,10 0,05 0,0 o \ \ 0 "-"-\ ~ 2 "-0 "-"-"-" " 0 o ", 0 0 2 '----- [q.uation (9) - - Eq.uation (10) o Monte Carlo-Davis 6 8 LIR -- Equation (9) - - Equation (10) o IV/ante Carlo-Davis o o -------6 8 LIR Fig. 4. Transmission probabilities of the system shown in Fig. 2. a) F = 2.25; b) F = 1.25 160 L. FuSTOSS and G. TaTH used in (9). From (9) and (12) 2F(F -1) CXR = ---------'----'------(F 1)(4F+LjR)-2(F--2) (13) if LjR is given according to Fig. 2. Correction for short tubes The transmission probabilities of composite systems, obtained from (9), (10) or (13) are inadequate for short geometries. The reason of this is the assumption in the derivation of (6) that the distribution of the molecules along any crosl"-section of the system is uniform, which is far from true in the case of short systems. To consider the real distribution is far more diffieult and a simple method to get suitable r0sults is to correct the formulae obtained by (6). The correction can be done by interpolation, prescribing the known values ofcx. [For example for ex = 1, that is LjR = 0, let CXR = 0 in (9).] A correction of (10) by this method fairly approximates the known Monte Carlo data [5]. A proper correction for (13) can be given by the factor LjR (14) LjR + 0,2 The results are shown in Figs 5a and 5b compared to DAVIS's data. To get the suitable factor, our intention was to find a simple formula for ct.R = 0 where L/R = 0 and 't.R will be unchanged if LjR -+ =. Conclusions To obtain proper formulae for the computation of the transmISSIOn probabilities of complex systems of various geometries it is necessary to define clearly the physical assumptions in the derivation. This gives the possibility to determine the range of validity of the formula, and the influence of the approximation upon the final result. The evaluation of the obtained result is most effective, if it is possible to compare it with some Monte Carlo data. In the knowledge of the limits of the formulae obtained from simple physical assumptions it is possible to derive correction factors extending their practical validity. COMPUTATIO.Y OF THE TRANSJflSSIO,Y PROBABILITY 161 ex 0,36 ol1onte Carlo-Davis 0,30 0,20 0,10 2 6 8 LIR ex 0,30 oMonle Carlo-Davis 0,20 0,10 2 4 6 8 Llf? Fig. 5. Transmission probabilities of the system shown in Fig. 2 calculated by (13) corrected by (14). a) F = 2; b) F = 1.5 Summary A general procedure is given to compute the transmission probability of composite systems from data of cylindrical tubes. The obtained results are compared to known Monte Carlo data, and to the results of other approximate methods. The errors of the procedure are explained and corrected with proper interpolation formulae. References 1. OATLEY, C. W.: British J. Appl. Phys. 8, 15 (1957). 2. BALLANCE, J. 0.: Trans. 3rd Int. Vac. Congress, Vol. 2, 85 (1965). 3. DAVIS, D. H.: J. Appl. Phys. 31, 1169 (1960). 4. HELlIlER, J. C.: J. Vac. Sci. Technol. 4, 179 (1967). 5. FusToss, L.: Vacuum 20, 279 (1970). DDr . LG~sbz16 TF?STOSS, } Budapest XI., Budafoki ut 8, Hungary r. a or OTH 

COMPUTATION OF THE TRANSMISSION PROBABILITY OF COMPLEX SYSTEMS

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COMPUTATION OF THE TRANSMISSION PROBABILITY OF COMPLEX SYSTEMS

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Periodica Polytechnica (Budapest University of Technology and Economics)