Inkjet printing for microlenses, microcapsules and MEMS-like chip embedding

Abstract

Inkjet printing (IJP) is a flexible technique for the fabrication of spherical profiles benefiting from the localized surface tension effects. Combining IJP with top-down well established lithographic approaches enables fabricating spherical shapes with predefinable aspect ratios [1]. In this work, drop-on-demand (DOD) IJP of epoxy inks (InkEpo [2], micro resist technology GmbH) onto specific confinement platforms is presented for three applications: (1) microlens, (2) microcapsules with inner cavities, and (3) microcapsules embedding microchips.info:eu-repo/semantics/nonPublishe