The Uji Scanning Proton Microprobe (A. NATURAL SCIENCE)

ATSUSHI AOKI; Department of Nuclear Engineering, Faculty of Engineering, Kyoto University; Department of Nuclear Engineering, Faculty of Engineering, Kyoto University; FUMIO FUKUZAWA; KOJI YOSHIDA; Laboratory of Applied Physics, Kyoto Prefectural University; Laboratory of Applied Physics, Kyoto Prefectural University; YOICHI HARUYAMA; 吉田 紘二; 春山 洋一; 福沢 文雄; 青木 敦

The Uji Scanning Proton Microprobe (A. NATURAL SCIENCE)

Authors: ATSUSHI AOKI
Faculty of Engineering, Kyoto University Department of Nuclear Engineering
Faculty of Engineering, Kyoto University Department of Nuclear Engineering
FUMIO FUKUZAWA
KOJI YOSHIDA
Kyoto Prefectural University Laboratory of Applied Physics
Kyoto Prefectural University Laboratory of Applied Physics
YOICHI HARUYAMA
吉田紘二
春山洋一
福沢文雄
青木敦
Publication date: 18 November 1987
Publisher

Abstract

The Uji scanning microprobe system has been developed with a simple doublet configuration. The beam size was reduced to 18×16μm with current of the order of 100pA. The optical parameters have been calculated for comparison

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