The scanning microbeam PIXE (Particle Induced X-ray Emission) analysisallows identifying the several surface elements and taking thehigh-resolution elemental maps of the specimen at a time, by using thenarrow beam downed the size to 1 micrometer and the maximum scanning area of2mm square.We are applying this system to the elements and the structure analysis forbio-cells and environmental specimens.The most important procedure to obtain the high-resolution maps isincreasing spatial resolution of the microbeam.We diagnose the resolution by using Scanning Transmission Ion Microscopy(STIM) and PIXE images of the 12.5um pitch copper mesh.In this workshop, we introduce our experiences of the alignment of themicrobeam system.Workshop on Accelerator Operation(WAO) 200
