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SAW-Pirani vacuum sensor with extended range and sensitivity
Authors
Gian Luca MORINI
Jan G. KORVINK
+4 more
Juergen J. BRANDNER
Michael RAPP
Pascal NICOLAY
Sofia TOTO
Publication date
1 January 2018
Publisher
country:USA
Abstract
In this abstract, a micro wireless vacuum sensor is presented to be operated between high vacuum and atmospheric pressure. The sensor combines the Pirani principle and Surface Acoustic Waves
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Archivio istituzionale della ricerca - Alma Mater Studiorum Università di Bologna
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oai:cris.unibo.it:11585/700315
Last time updated on 29/10/2019