CORE
🇺🇦
make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Cryogenic process for Atomic Layer Etching
Authors
Gaëlle Antoun
Remi Dussart
+6 more
Jacques Faguet
Philippe Lefaucheux
Kaoru Maekawa
Thomas Tillocher
kumiko yamazaki
Koichi Yatsuda
Publication date
Publisher
HAL CCSD
Abstract
International audienc
Similar works
Full text
Available Versions
Archive Ouverte en Sciences de l'Information et de la Communication
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:HAL:hal-02311291v1
Last time updated on 21/10/2019
