One aspect of the disclosure is directed to a method for forming an antireflective coating on a substrate, which includes providing a polymer solution and a silica solution, depositing the polymer solution on a surface of the substrate to forming a polymer film thereon, depositing the silica solution on the formed polymer film on the substrate to form a silica film thereon, thereby forming a stack structure having the silica film formed on the polymer film that is, in turn, formed on the substrate, and drying the stack structure to form the antireflective coating on the substrate, wherein the antireflective coating comprises silica nanoparticles
