thesis

Distortion analysis on an improved mask technology for X-ray lithography

Authors
Publication date
1 January 1999
Publisher
Massachusetts Institute of Technology

Abstract

Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.Includes bibliographical references (leaves 90-91).by Kevin P. Pipe.S.B.and M.Eng

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