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Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip
Authors
Mark Breese B.H.
Sascha Pierre Heussler
+5Â more
Shenbaga Manogara Pandian Kalaiselvi
Harsha Kasi
Herbert Moser Oskar
Shuvan Prashant Turaga
Eric Tang Xiaosong
Publication date
21 June 2021
Publisher
Springer Nature
Abstract
Nature Nanotechnolog
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Last time updated on 09/12/2021
