A semiconductor device which displays an oscillating voltage due to the creation of charge domains which includes a plurality of semiconductor layers and at least two electrodes spaced from one another in the direction of the layers, an upper of which has a composition and/or dimensions predetermined so that a charge therein balances a depletion from a surface charge of the upper layer on application of a potential difference across said electrodes. The electrodes may be in contact solely with the upper layer. A method of manufacturing the device is also provided