Titanium dioxide based 64° YX LiNbO3 surface acoustic wave hydrogen gas sensors

Abstract

Amorphous titanium dioxide (TiO2) and gold (Au) doped TiO2-based surface acoustic wave (SAW) sensors have been investigated as hydrogen gas detectors. The nanocrystal-doped TiO2 films were synthesized through a sol-gel route,mixing a Ti-butoxide-based solution with diluted colloidal gold nanoparticles. The films were deposited via spin coating onto 64\ub0 YX LiNbO3 SAWtransducers in a helium atmosphere. The SAW gas sensors were operated at various temperatures between 150 and 310 \ub0C. It was found that gold doping on TiO2 increased the device sensitivity and reduced the optimum operating temperature