The equipment of the Ural Center for Shared Use “Modern nanotechnology” UrFU was used. The research was made possible in part by Government of the Rus-sian Federation (Act 211, Agreement 02.A03.21.0006) and by President of Russian Federation grant for young scientists (Contract 14.Y30.16.8441-МК). V.S. acknowledges financial support within the State Task from the Ministry of Education and Science of the Russian Federation (Project No. 1366.2014/236)