We present on fabrication and noise properties of high-temperature superconducting (HTS) thin-film integrated multilayer flux transformers fabricated using planarization of YBCO films by chemical-mechanical polishing (CMP). The polishing allows fabrication of very shallow slope edges (less than 5\ub0) in the YBa2Cu3O7, that makes it possible to avoid formation of grain boundary junctions in crossovers and obtain very high critical current densities in the top electrode of about 2•106 A/cm2. The same planarization process is used to create interconnections between top and bottom superconducting electrodes through the SrTiO3/PrBa2Cu3O7/SrTiO3 insulating layer. HTS multilayer flip-chip flux transformer with 8x8 mm2 pickup loop and 20-turn input coil was fabricated and coupled to a bicrystal dc SQUID in a flip-chip configuration. We measured magnetic field gain of 1.2 nT/Ф0 and magnetic flux noise of the magnetometer 10 \ub5Ф0/√Hz at 1 kHz, which corresponds to magnetic field noise of 12 ft/√Hz. FLUX NOISE AT LOW FREQUENCIES! The work is supported by European FP7 project "MEGMRI" under contract number 200859
